JPS5391670A - Transfer method for semiconductor wafer - Google Patents
Transfer method for semiconductor waferInfo
- Publication number
- JPS5391670A JPS5391670A JP656877A JP656877A JPS5391670A JP S5391670 A JPS5391670 A JP S5391670A JP 656877 A JP656877 A JP 656877A JP 656877 A JP656877 A JP 656877A JP S5391670 A JPS5391670 A JP S5391670A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- transfer method
- carriers
- wafers
- multiplication
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To make unnecessary the complicated pitch feed mechanism and to reduce the transfer time, by giving the relation of the multiplication by an integer number to the number of wafers between a pair of the wafer carriers to be transferred and by providing the separating plate between the carriers simultaneously.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP656877A JPS5391670A (en) | 1977-01-24 | 1977-01-24 | Transfer method for semiconductor wafer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP656877A JPS5391670A (en) | 1977-01-24 | 1977-01-24 | Transfer method for semiconductor wafer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5391670A true JPS5391670A (en) | 1978-08-11 |
Family
ID=11641932
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP656877A Pending JPS5391670A (en) | 1977-01-24 | 1977-01-24 | Transfer method for semiconductor wafer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5391670A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62195140A (en) * | 1986-02-21 | 1987-08-27 | Hitachi Ltd | Wafer transfer device |
-
1977
- 1977-01-24 JP JP656877A patent/JPS5391670A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62195140A (en) * | 1986-02-21 | 1987-08-27 | Hitachi Ltd | Wafer transfer device |
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