JPS5391670A - Transfer method for semiconductor wafer - Google Patents

Transfer method for semiconductor wafer

Info

Publication number
JPS5391670A
JPS5391670A JP656877A JP656877A JPS5391670A JP S5391670 A JPS5391670 A JP S5391670A JP 656877 A JP656877 A JP 656877A JP 656877 A JP656877 A JP 656877A JP S5391670 A JPS5391670 A JP S5391670A
Authority
JP
Japan
Prior art keywords
semiconductor wafer
transfer method
carriers
wafers
multiplication
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP656877A
Other languages
Japanese (ja)
Inventor
Masahiko Nakatsuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP656877A priority Critical patent/JPS5391670A/en
Publication of JPS5391670A publication Critical patent/JPS5391670A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To make unnecessary the complicated pitch feed mechanism and to reduce the transfer time, by giving the relation of the multiplication by an integer number to the number of wafers between a pair of the wafer carriers to be transferred and by providing the separating plate between the carriers simultaneously.
COPYRIGHT: (C)1978,JPO&Japio
JP656877A 1977-01-24 1977-01-24 Transfer method for semiconductor wafer Pending JPS5391670A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP656877A JPS5391670A (en) 1977-01-24 1977-01-24 Transfer method for semiconductor wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP656877A JPS5391670A (en) 1977-01-24 1977-01-24 Transfer method for semiconductor wafer

Publications (1)

Publication Number Publication Date
JPS5391670A true JPS5391670A (en) 1978-08-11

Family

ID=11641932

Family Applications (1)

Application Number Title Priority Date Filing Date
JP656877A Pending JPS5391670A (en) 1977-01-24 1977-01-24 Transfer method for semiconductor wafer

Country Status (1)

Country Link
JP (1) JPS5391670A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62195140A (en) * 1986-02-21 1987-08-27 Hitachi Ltd Wafer transfer device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62195140A (en) * 1986-02-21 1987-08-27 Hitachi Ltd Wafer transfer device

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