JPS5391463U - - Google Patents
Info
- Publication number
- JPS5391463U JPS5391463U JP17638676U JP17638676U JPS5391463U JP S5391463 U JPS5391463 U JP S5391463U JP 17638676 U JP17638676 U JP 17638676U JP 17638676 U JP17638676 U JP 17638676U JP S5391463 U JPS5391463 U JP S5391463U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17638676U JPS5391463U (en) | 1976-12-27 | 1976-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17638676U JPS5391463U (en) | 1976-12-27 | 1976-12-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5391463U true JPS5391463U (en) | 1978-07-26 |
Family
ID=28783731
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17638676U Pending JPS5391463U (en) | 1976-12-27 | 1976-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5391463U (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4883776A (en) * | 1972-01-17 | 1973-11-08 | ||
| JPS505562B1 (en) * | 1970-02-25 | 1975-03-05 | ||
| JPS5340272A (en) * | 1976-09-23 | 1978-04-12 | Siemens Ag | Apparatus for diffusing semiconductor substrate |
-
1976
- 1976-12-27 JP JP17638676U patent/JPS5391463U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS505562B1 (en) * | 1970-02-25 | 1975-03-05 | ||
| JPS4883776A (en) * | 1972-01-17 | 1973-11-08 | ||
| JPS5340272A (en) * | 1976-09-23 | 1978-04-12 | Siemens Ag | Apparatus for diffusing semiconductor substrate |