JPS5383768A - Pattern detection - Google Patents

Pattern detection

Info

Publication number
JPS5383768A
JPS5383768A JP15947276A JP15947276A JPS5383768A JP S5383768 A JPS5383768 A JP S5383768A JP 15947276 A JP15947276 A JP 15947276A JP 15947276 A JP15947276 A JP 15947276A JP S5383768 A JPS5383768 A JP S5383768A
Authority
JP
Japan
Prior art keywords
bit cell
inflection point
bit
center
pattern detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15947276A
Other languages
Japanese (ja)
Other versions
JPS5939790B2 (en
Inventor
Yoshiaki Goto
Masahito Nakajima
Moritoshi Ando
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP51159472A priority Critical patent/JPS5939790B2/en
Publication of JPS5383768A publication Critical patent/JPS5383768A/en
Publication of JPS5939790B2 publication Critical patent/JPS5939790B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

PURPOSE: To make it possible to find out the defect without any dictionary by judging the inflection point of the center bit cell comes from the defect when a bit indicating the inflection point appears in the center bit cell of a matrix bit cell a0d when the bit indirating the inflection point appears in the bit cell other than the center.
COPYRIGHT: (C)1978,JPO&Japio
JP51159472A 1976-12-29 1976-12-29 Pattern inspection method Expired JPS5939790B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP51159472A JPS5939790B2 (en) 1976-12-29 1976-12-29 Pattern inspection method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP51159472A JPS5939790B2 (en) 1976-12-29 1976-12-29 Pattern inspection method

Publications (2)

Publication Number Publication Date
JPS5383768A true JPS5383768A (en) 1978-07-24
JPS5939790B2 JPS5939790B2 (en) 1984-09-26

Family

ID=15694507

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51159472A Expired JPS5939790B2 (en) 1976-12-29 1976-12-29 Pattern inspection method

Country Status (1)

Country Link
JP (1) JPS5939790B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4908871A (en) * 1986-04-21 1990-03-13 Hitachi, Ltd. Pattern inspection system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4908871A (en) * 1986-04-21 1990-03-13 Hitachi, Ltd. Pattern inspection system

Also Published As

Publication number Publication date
JPS5939790B2 (en) 1984-09-26

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