JPS5383768A - Pattern detection - Google Patents
Pattern detectionInfo
- Publication number
- JPS5383768A JPS5383768A JP15947276A JP15947276A JPS5383768A JP S5383768 A JPS5383768 A JP S5383768A JP 15947276 A JP15947276 A JP 15947276A JP 15947276 A JP15947276 A JP 15947276A JP S5383768 A JPS5383768 A JP S5383768A
- Authority
- JP
- Japan
- Prior art keywords
- bit cell
- inflection point
- bit
- center
- pattern detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Image Processing (AREA)
- Image Analysis (AREA)
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
PURPOSE: To make it possible to find out the defect without any dictionary by judging the inflection point of the center bit cell comes from the defect when a bit indicating the inflection point appears in the center bit cell of a matrix bit cell a0d when the bit indirating the inflection point appears in the bit cell other than the center.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51159472A JPS5939790B2 (en) | 1976-12-29 | 1976-12-29 | Pattern inspection method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51159472A JPS5939790B2 (en) | 1976-12-29 | 1976-12-29 | Pattern inspection method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5383768A true JPS5383768A (en) | 1978-07-24 |
JPS5939790B2 JPS5939790B2 (en) | 1984-09-26 |
Family
ID=15694507
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP51159472A Expired JPS5939790B2 (en) | 1976-12-29 | 1976-12-29 | Pattern inspection method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5939790B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4908871A (en) * | 1986-04-21 | 1990-03-13 | Hitachi, Ltd. | Pattern inspection system |
-
1976
- 1976-12-29 JP JP51159472A patent/JPS5939790B2/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4908871A (en) * | 1986-04-21 | 1990-03-13 | Hitachi, Ltd. | Pattern inspection system |
Also Published As
Publication number | Publication date |
---|---|
JPS5939790B2 (en) | 1984-09-26 |
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