JPS5383767A - Pattern detecttion - Google Patents

Pattern detecttion

Info

Publication number
JPS5383767A
JPS5383767A JP15947176A JP15947176A JPS5383767A JP S5383767 A JPS5383767 A JP S5383767A JP 15947176 A JP15947176 A JP 15947176A JP 15947176 A JP15947176 A JP 15947176A JP S5383767 A JPS5383767 A JP S5383767A
Authority
JP
Japan
Prior art keywords
inflection point
pattern
detecttion
point information
information
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15947176A
Other languages
Japanese (ja)
Other versions
JPS5919387B2 (en
Inventor
Yoshiaki Goto
Masahito Nakajima
Katsumi Fujiwara
Yasuo Furukawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP51159471A priority Critical patent/JPS5919387B2/en
Publication of JPS5383767A publication Critical patent/JPS5383767A/en
Publication of JPS5919387B2 publication Critical patent/JPS5919387B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)

Abstract

PURPOSE: To find out the defect of a pattern by extracting the inflection point information, which is indicative of the inflection point where the differential coefficient becomes discontinuous, from the contour information so that the inflection point information is compared with the normal reference inflection point information which is prepared in advance.
COPYRIGHT: (C)1978,JPO&Japio
JP51159471A 1976-12-29 1976-12-29 Pattern inspection method Expired JPS5919387B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP51159471A JPS5919387B2 (en) 1976-12-29 1976-12-29 Pattern inspection method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP51159471A JPS5919387B2 (en) 1976-12-29 1976-12-29 Pattern inspection method

Publications (2)

Publication Number Publication Date
JPS5383767A true JPS5383767A (en) 1978-07-24
JPS5919387B2 JPS5919387B2 (en) 1984-05-04

Family

ID=15694485

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51159471A Expired JPS5919387B2 (en) 1976-12-29 1976-12-29 Pattern inspection method

Country Status (1)

Country Link
JP (1) JPS5919387B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58134429A (en) * 1982-02-04 1983-08-10 Nippon Kogaku Kk <Nikon> Testing device for defect of pattern
JPS62131391A (en) * 1985-12-04 1987-06-13 Hitachi Ltd Pattern checking method
JPS63163578A (en) * 1986-12-25 1988-07-07 Matsushita Electric Ind Co Ltd Foreign matter detecting device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58134429A (en) * 1982-02-04 1983-08-10 Nippon Kogaku Kk <Nikon> Testing device for defect of pattern
JPH0480427B2 (en) * 1982-02-04 1992-12-18 Nippon Kogaku Kk
JPS62131391A (en) * 1985-12-04 1987-06-13 Hitachi Ltd Pattern checking method
JPS63163578A (en) * 1986-12-25 1988-07-07 Matsushita Electric Ind Co Ltd Foreign matter detecting device

Also Published As

Publication number Publication date
JPS5919387B2 (en) 1984-05-04

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