JPS5383767A - Pattern detecttion - Google Patents
Pattern detecttionInfo
- Publication number
- JPS5383767A JPS5383767A JP15947176A JP15947176A JPS5383767A JP S5383767 A JPS5383767 A JP S5383767A JP 15947176 A JP15947176 A JP 15947176A JP 15947176 A JP15947176 A JP 15947176A JP S5383767 A JPS5383767 A JP S5383767A
- Authority
- JP
- Japan
- Prior art keywords
- inflection point
- pattern
- detecttion
- point information
- information
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Image Processing (AREA)
- Image Analysis (AREA)
Abstract
PURPOSE: To find out the defect of a pattern by extracting the inflection point information, which is indicative of the inflection point where the differential coefficient becomes discontinuous, from the contour information so that the inflection point information is compared with the normal reference inflection point information which is prepared in advance.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51159471A JPS5919387B2 (en) | 1976-12-29 | 1976-12-29 | Pattern inspection method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51159471A JPS5919387B2 (en) | 1976-12-29 | 1976-12-29 | Pattern inspection method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5383767A true JPS5383767A (en) | 1978-07-24 |
JPS5919387B2 JPS5919387B2 (en) | 1984-05-04 |
Family
ID=15694485
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP51159471A Expired JPS5919387B2 (en) | 1976-12-29 | 1976-12-29 | Pattern inspection method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5919387B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58134429A (en) * | 1982-02-04 | 1983-08-10 | Nippon Kogaku Kk <Nikon> | Testing device for defect of pattern |
JPS62131391A (en) * | 1985-12-04 | 1987-06-13 | Hitachi Ltd | Pattern checking method |
JPS63163578A (en) * | 1986-12-25 | 1988-07-07 | Matsushita Electric Ind Co Ltd | Foreign matter detecting device |
-
1976
- 1976-12-29 JP JP51159471A patent/JPS5919387B2/en not_active Expired
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58134429A (en) * | 1982-02-04 | 1983-08-10 | Nippon Kogaku Kk <Nikon> | Testing device for defect of pattern |
JPH0480427B2 (en) * | 1982-02-04 | 1992-12-18 | Nippon Kogaku Kk | |
JPS62131391A (en) * | 1985-12-04 | 1987-06-13 | Hitachi Ltd | Pattern checking method |
JPS63163578A (en) * | 1986-12-25 | 1988-07-07 | Matsushita Electric Ind Co Ltd | Foreign matter detecting device |
Also Published As
Publication number | Publication date |
---|---|
JPS5919387B2 (en) | 1984-05-04 |
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