JPS5381487A - Method and apparatus for liquid phase epitaxial growth - Google Patents

Method and apparatus for liquid phase epitaxial growth

Info

Publication number
JPS5381487A
JPS5381487A JP15991576A JP15991576A JPS5381487A JP S5381487 A JPS5381487 A JP S5381487A JP 15991576 A JP15991576 A JP 15991576A JP 15991576 A JP15991576 A JP 15991576A JP S5381487 A JPS5381487 A JP S5381487A
Authority
JP
Japan
Prior art keywords
liquid phase
epitaxial growth
phase epitaxial
solution
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15991576A
Other languages
Japanese (ja)
Inventor
Kenzo Akita
Akio Yamaguchi
Saburo Nakai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15991576A priority Critical patent/JPS5381487A/en
Publication of JPS5381487A publication Critical patent/JPS5381487A/en
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

PURPOSE: To effectively carry out wholesome crystal growth, by maintaining the condition of contacting liquid for crystal growth with the growth face of substrate always and dropping the temperature of solution, rotating the solution and substrate, so as the solution to be placed alternately upper and lower situation against the substrate.
COPYRIGHT: (C)1978,JPO&Japio
JP15991576A 1976-12-27 1976-12-27 Method and apparatus for liquid phase epitaxial growth Pending JPS5381487A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15991576A JPS5381487A (en) 1976-12-27 1976-12-27 Method and apparatus for liquid phase epitaxial growth

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15991576A JPS5381487A (en) 1976-12-27 1976-12-27 Method and apparatus for liquid phase epitaxial growth

Publications (1)

Publication Number Publication Date
JPS5381487A true JPS5381487A (en) 1978-07-18

Family

ID=15703924

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15991576A Pending JPS5381487A (en) 1976-12-27 1976-12-27 Method and apparatus for liquid phase epitaxial growth

Country Status (1)

Country Link
JP (1) JPS5381487A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5888198A (en) * 1981-11-19 1983-05-26 Sanyo Electric Co Ltd Growth of liquid phase

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5888198A (en) * 1981-11-19 1983-05-26 Sanyo Electric Co Ltd Growth of liquid phase
JPH0240639B2 (en) * 1981-11-19 1990-09-12 Sanyo Electric Co

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