JPS5375775A - Alignment unit - Google Patents

Alignment unit

Info

Publication number
JPS5375775A
JPS5375775A JP15173276A JP15173276A JPS5375775A JP S5375775 A JPS5375775 A JP S5375775A JP 15173276 A JP15173276 A JP 15173276A JP 15173276 A JP15173276 A JP 15173276A JP S5375775 A JPS5375775 A JP S5375775A
Authority
JP
Japan
Prior art keywords
alignment unit
calibrater
reaccess
evacuation
hit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15173276A
Other languages
Japanese (ja)
Inventor
Masao Kosugi
Hideki Yoshinari
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP15173276A priority Critical patent/JPS5375775A/en
Publication of JPS5375775A publication Critical patent/JPS5375775A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To arrange two substrates in parallel with a given distance, by arbitrarily enabling to set the quantity of shift for the evacuation of the calibrater or reaccess, after the substrate is hit on the calibrater.
COPYRIGHT: (C)1978,JPO&Japio
JP15173276A 1976-12-16 1976-12-16 Alignment unit Pending JPS5375775A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15173276A JPS5375775A (en) 1976-12-16 1976-12-16 Alignment unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15173276A JPS5375775A (en) 1976-12-16 1976-12-16 Alignment unit

Publications (1)

Publication Number Publication Date
JPS5375775A true JPS5375775A (en) 1978-07-05

Family

ID=15525069

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15173276A Pending JPS5375775A (en) 1976-12-16 1976-12-16 Alignment unit

Country Status (1)

Country Link
JP (1) JPS5375775A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE112018001680T5 (en) 2017-03-29 2019-12-19 Denso Corporation Vehicle control device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50152670A (en) * 1974-05-28 1975-12-08

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50152670A (en) * 1974-05-28 1975-12-08

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE112018001680T5 (en) 2017-03-29 2019-12-19 Denso Corporation Vehicle control device

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