JPS5375775A - Alignment unit - Google Patents
Alignment unitInfo
- Publication number
- JPS5375775A JPS5375775A JP15173276A JP15173276A JPS5375775A JP S5375775 A JPS5375775 A JP S5375775A JP 15173276 A JP15173276 A JP 15173276A JP 15173276 A JP15173276 A JP 15173276A JP S5375775 A JPS5375775 A JP S5375775A
- Authority
- JP
- Japan
- Prior art keywords
- alignment unit
- calibrater
- reaccess
- evacuation
- hit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
PURPOSE: To arrange two substrates in parallel with a given distance, by arbitrarily enabling to set the quantity of shift for the evacuation of the calibrater or reaccess, after the substrate is hit on the calibrater.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15173276A JPS5375775A (en) | 1976-12-16 | 1976-12-16 | Alignment unit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15173276A JPS5375775A (en) | 1976-12-16 | 1976-12-16 | Alignment unit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5375775A true JPS5375775A (en) | 1978-07-05 |
Family
ID=15525069
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15173276A Pending JPS5375775A (en) | 1976-12-16 | 1976-12-16 | Alignment unit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5375775A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE112018001680T5 (en) | 2017-03-29 | 2019-12-19 | Denso Corporation | Vehicle control device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50152670A (en) * | 1974-05-28 | 1975-12-08 |
-
1976
- 1976-12-16 JP JP15173276A patent/JPS5375775A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50152670A (en) * | 1974-05-28 | 1975-12-08 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE112018001680T5 (en) | 2017-03-29 | 2019-12-19 | Denso Corporation | Vehicle control device |
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