JPS5366174U - - Google Patents
Info
- Publication number
- JPS5366174U JPS5366174U JP14970276U JP14970276U JPS5366174U JP S5366174 U JPS5366174 U JP S5366174U JP 14970276 U JP14970276 U JP 14970276U JP 14970276 U JP14970276 U JP 14970276U JP S5366174 U JPS5366174 U JP S5366174U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14970276U JPS5366174U (en) | 1976-11-08 | 1976-11-08 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14970276U JPS5366174U (en) | 1976-11-08 | 1976-11-08 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5366174U true JPS5366174U (en) | 1978-06-03 |
Family
ID=28758029
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14970276U Pending JPS5366174U (en) | 1976-11-08 | 1976-11-08 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5366174U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5783030A (en) * | 1980-11-11 | 1982-05-24 | Fujitsu Ltd | Exposure of electron beam |
-
1976
- 1976-11-08 JP JP14970276U patent/JPS5366174U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5783030A (en) * | 1980-11-11 | 1982-05-24 | Fujitsu Ltd | Exposure of electron beam |