JPS536282A - Spattering process and apparatus - Google Patents
Spattering process and apparatusInfo
- Publication number
- JPS536282A JPS536282A JP8035277A JP8035277A JPS536282A JP S536282 A JPS536282 A JP S536282A JP 8035277 A JP8035277 A JP 8035277A JP 8035277 A JP8035277 A JP 8035277A JP S536282 A JPS536282 A JP S536282A
- Authority
- JP
- Japan
- Prior art keywords
- spattering process
- spattering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
- H01J37/3405—Magnetron sputtering
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL7607473A NL7607473A (nl) | 1976-07-07 | 1976-07-07 | Verstuifinrichting en werkwijze voor het ver- stuiven met een dergelijke inrichting. |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS536282A true JPS536282A (en) | 1978-01-20 |
Family
ID=19826537
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8035277A Pending JPS536282A (en) | 1976-07-07 | 1977-07-05 | Spattering process and apparatus |
JP1983128511U Expired JPS6028689Y2 (ja) | 1976-07-07 | 1983-08-22 | スパツタリング装置 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1983128511U Expired JPS6028689Y2 (ja) | 1976-07-07 | 1983-08-22 | スパツタリング装置 |
Country Status (14)
Country | Link |
---|---|
JP (2) | JPS536282A (sv) |
AT (1) | AT352493B (sv) |
AU (1) | AU506847B2 (sv) |
BR (1) | BR7704375A (sv) |
CA (1) | CA1081656A (sv) |
CH (1) | CH618289A5 (sv) |
DE (1) | DE2729286A1 (sv) |
ES (1) | ES460405A1 (sv) |
FR (1) | FR2358020A1 (sv) |
GB (1) | GB1587566A (sv) |
IT (1) | IT1076083B (sv) |
NL (1) | NL7607473A (sv) |
SE (1) | SE7707729L (sv) |
ZA (1) | ZA773538B (sv) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55155866U (sv) * | 1979-04-20 | 1980-11-10 | ||
JPS59116375A (ja) * | 1982-11-26 | 1984-07-05 | Kawasaki Heavy Ind Ltd | スパッタリング装置 |
JPS59179782A (ja) * | 1983-03-31 | 1984-10-12 | Kawasaki Heavy Ind Ltd | スパツタリング装置の電極部構造 |
JPS59169352U (ja) * | 1983-04-25 | 1984-11-13 | 川崎重工業株式会社 | スパツタリング装置の電極部構造 |
JP2013057095A (ja) * | 2011-09-07 | 2013-03-28 | Ulvac Japan Ltd | マグネトロンスパッタカソード |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL7902846A (nl) * | 1978-04-12 | 1979-10-16 | Battelle Memorial Institute | Werkwijze voor de vervaardiging van elektrodes voor brandstofcellen, inrichting voor het in toepassing brengen van deze werkwijze, alsmede elektrodes voort- komende uit deze werkwijze. |
CA1141704A (en) * | 1978-08-21 | 1983-02-22 | Charles F. Morrison, Jr. | Magnetically enhanced sputtering device |
GB2051877B (en) * | 1979-04-09 | 1983-03-02 | Vac Tec Syst | Magnetically enhanced sputtering device and method |
US4356073A (en) * | 1981-02-12 | 1982-10-26 | Shatterproof Glass Corporation | Magnetron cathode sputtering apparatus |
DE3316548C2 (de) * | 1983-03-25 | 1985-01-17 | Flachglas AG, 8510 Fürth | Verfahren zur Beschichtung eines transparenten Substrates |
DE3406953C2 (de) * | 1983-04-19 | 1986-03-13 | Balzers Hochvakuum Gmbh, 6200 Wiesbaden | Verfahren zum Erwärmen von Heizgut in einem Vakuumrezipienten |
CH659346A5 (de) * | 1983-05-10 | 1987-01-15 | Balzers Hochvakuum | Vorrichtung zum behandeln der innenwand eines rohres. |
CH668565A5 (de) * | 1986-06-23 | 1989-01-13 | Balzers Hochvakuum | Verfahren und anordnung zum zerstaeuben eines materials mittels hochfrequenz. |
AT392291B (de) * | 1987-09-01 | 1991-02-25 | Miba Gleitlager Ag | Stabfoermige sowie magnetron- bzw. sputterkathodenanordnung, sputterverfahren, und vorrichtung zur durchfuehrung des verfahrens |
DE4018914C1 (sv) * | 1990-06-13 | 1991-06-06 | Leybold Ag, 6450 Hanau, De | |
DE4022708A1 (de) * | 1990-07-17 | 1992-04-02 | Balzers Hochvakuum | Aetz- oder beschichtungsanlagen |
DE4042417C2 (de) * | 1990-07-17 | 1993-11-25 | Balzers Hochvakuum | Ätz- oder Beschichtungsanlage sowie Verfahren zu ihrem Zünden oder intermittierenden Betreiben |
DE4107505A1 (de) * | 1991-03-08 | 1992-09-10 | Leybold Ag | Verfahren zum betrieb einer sputteranlage und vorrichtung zur durchfuehrung des verfahrens |
WO1995032517A1 (fr) * | 1994-05-24 | 1995-11-30 | Rossiisko-Shveitsarskoe Aktsionernoe Obschestvo Zakrytogo Tipa 'nova' | Procede de production d'une decharge electrique et son dispositif de mise en ×uvre |
DE19623359A1 (de) * | 1995-08-17 | 1997-02-20 | Leybold Ag | Vorrichtung zum Beschichten eines Substrats |
DE19652633A1 (de) * | 1996-09-13 | 1998-03-19 | Euromat Gmbh | Verfahren und Vorrichtung zum Innenbeschichten metallischer Bauteile |
DE19727647A1 (de) * | 1997-06-12 | 1998-12-17 | Leybold Ag | Vorrichtung zum Beschichten eines Substratkörpers mittels Kathodenzerstäubung |
US9111734B2 (en) | 2013-10-31 | 2015-08-18 | General Electric Company | Systems and method of coating an interior surface of an object |
US20150114828A1 (en) * | 2013-10-31 | 2015-04-30 | General Electric Company | Systems and method of coating an interior surface of an object |
JP2022178656A (ja) * | 2021-05-20 | 2022-12-02 | 大学共同利用機関法人 高エネルギー加速器研究機構 | 非蒸発型ゲッタコーティング装置、非蒸発型ゲッタコーティング容器・配管の製造方法、非蒸発型ゲッタコーティング容器・配管 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4945849A (sv) * | 1972-09-08 | 1974-05-01 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3884793A (en) * | 1971-09-07 | 1975-05-20 | Telic Corp | Electrode type glow discharge apparatus |
US4166018A (en) * | 1974-01-31 | 1979-08-28 | Airco, Inc. | Sputtering process and apparatus |
US3956093A (en) * | 1974-12-16 | 1976-05-11 | Airco, Inc. | Planar magnetron sputtering method and apparatus |
-
1976
- 1976-07-07 NL NL7607473A patent/NL7607473A/xx not_active Application Discontinuation
-
1977
- 1977-06-13 ZA ZA00773538A patent/ZA773538B/xx unknown
- 1977-06-29 DE DE19772729286 patent/DE2729286A1/de active Granted
- 1977-06-29 CA CA281,665A patent/CA1081656A/en not_active Expired
- 1977-07-01 AU AU26688/77A patent/AU506847B2/en not_active Expired
- 1977-07-04 SE SE7707729A patent/SE7707729L/sv unknown
- 1977-07-04 CH CH820677A patent/CH618289A5/de not_active IP Right Cessation
- 1977-07-04 IT IT25372/77A patent/IT1076083B/it active
- 1977-07-04 GB GB27861/77A patent/GB1587566A/en not_active Expired
- 1977-07-04 BR BR7704375A patent/BR7704375A/pt unknown
- 1977-07-05 ES ES460405A patent/ES460405A1/es not_active Expired
- 1977-07-05 JP JP8035277A patent/JPS536282A/ja active Pending
- 1977-07-05 FR FR7720561A patent/FR2358020A1/fr active Granted
- 1977-07-06 AT AT482777A patent/AT352493B/de not_active IP Right Cessation
-
1983
- 1983-08-22 JP JP1983128511U patent/JPS6028689Y2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4945849A (sv) * | 1972-09-08 | 1974-05-01 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55155866U (sv) * | 1979-04-20 | 1980-11-10 | ||
JPS584923Y2 (ja) * | 1979-04-20 | 1983-01-27 | 株式会社 徳田製作所 | 横型スパッタリング装置 |
JPS59116375A (ja) * | 1982-11-26 | 1984-07-05 | Kawasaki Heavy Ind Ltd | スパッタリング装置 |
JPS59179782A (ja) * | 1983-03-31 | 1984-10-12 | Kawasaki Heavy Ind Ltd | スパツタリング装置の電極部構造 |
JPS59169352U (ja) * | 1983-04-25 | 1984-11-13 | 川崎重工業株式会社 | スパツタリング装置の電極部構造 |
JP2013057095A (ja) * | 2011-09-07 | 2013-03-28 | Ulvac Japan Ltd | マグネトロンスパッタカソード |
Also Published As
Publication number | Publication date |
---|---|
ZA773538B (en) | 1979-01-31 |
JPS5947654U (ja) | 1984-03-29 |
NL7607473A (nl) | 1978-01-10 |
ATA482777A (de) | 1979-02-15 |
DE2729286C2 (sv) | 1988-05-11 |
FR2358020A1 (fr) | 1978-02-03 |
AU506847B2 (en) | 1980-01-24 |
AT352493B (de) | 1979-09-25 |
BR7704375A (pt) | 1978-05-16 |
DE2729286A1 (de) | 1978-01-12 |
AU2668877A (en) | 1979-01-04 |
SE7707729L (sv) | 1978-01-08 |
CH618289A5 (en) | 1980-07-15 |
JPS6028689Y2 (ja) | 1985-08-30 |
FR2358020B1 (sv) | 1982-11-12 |
CA1081656A (en) | 1980-07-15 |
IT1076083B (it) | 1985-04-22 |
ES460405A1 (es) | 1978-05-01 |
GB1587566A (en) | 1981-04-08 |
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