JPS5359377A - Insulating gate type electric field effect semiconductor unit and itsproduction - Google Patents
Insulating gate type electric field effect semiconductor unit and itsproductionInfo
- Publication number
- JPS5359377A JPS5359377A JP265776A JP265776A JPS5359377A JP S5359377 A JPS5359377 A JP S5359377A JP 265776 A JP265776 A JP 265776A JP 265776 A JP265776 A JP 265776A JP S5359377 A JPS5359377 A JP S5359377A
- Authority
- JP
- Japan
- Prior art keywords
- itsproduction
- electric field
- field effect
- type electric
- gate type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Weting (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Non-Volatile Memory (AREA)
- Local Oxidation Of Silicon (AREA)
Abstract
PURPOSE: To reduce a floating capacity between a gate and a source and between a gate and a drain, by forming the SiO2 film-which is formed on source and drain areaas-by the local oxidization of a semiconductor substrate and providing source and drain areas deeply in the substrate on the part except a channel forming part.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51002657A JPS597230B2 (en) | 1976-01-12 | 1976-01-12 | Insulated gate field effect semiconductor device and its manufacturing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51002657A JPS597230B2 (en) | 1976-01-12 | 1976-01-12 | Insulated gate field effect semiconductor device and its manufacturing method |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP46096086A Division JPS5141515B2 (en) | 1971-11-29 | 1971-11-29 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5359377A true JPS5359377A (en) | 1978-05-29 |
JPS597230B2 JPS597230B2 (en) | 1984-02-17 |
Family
ID=11535403
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP51002657A Expired JPS597230B2 (en) | 1976-01-12 | 1976-01-12 | Insulated gate field effect semiconductor device and its manufacturing method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS597230B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61127179A (en) * | 1984-11-21 | 1986-06-14 | ローム・コーポレーション | Electric program type memory for single transistor and method for maunfacturing and using the same |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4853679A (en) * | 1971-10-29 | 1973-07-27 | ||
JPS5141515A (en) * | 1974-10-04 | 1976-04-07 | Kawai Musical Instr Mfg Co | Denshigatsukino gakuonhatsuseisochi |
-
1976
- 1976-01-12 JP JP51002657A patent/JPS597230B2/en not_active Expired
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4853679A (en) * | 1971-10-29 | 1973-07-27 | ||
JPS5141515A (en) * | 1974-10-04 | 1976-04-07 | Kawai Musical Instr Mfg Co | Denshigatsukino gakuonhatsuseisochi |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61127179A (en) * | 1984-11-21 | 1986-06-14 | ローム・コーポレーション | Electric program type memory for single transistor and method for maunfacturing and using the same |
Also Published As
Publication number | Publication date |
---|---|
JPS597230B2 (en) | 1984-02-17 |
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