JPS5355960A - Breaking method for semiconductor wafer - Google Patents
Breaking method for semiconductor waferInfo
- Publication number
- JPS5355960A JPS5355960A JP13108176A JP13108176A JPS5355960A JP S5355960 A JPS5355960 A JP S5355960A JP 13108176 A JP13108176 A JP 13108176A JP 13108176 A JP13108176 A JP 13108176A JP S5355960 A JPS5355960 A JP S5355960A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- breaking method
- wafer
- breaking
- ensuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Dicing (AREA)
Abstract
PURPOSE: To secure an assured breaking of the wafer by ensuring a constant roller pressure at all times per unit pellet of the wafer.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13108176A JPS5355960A (en) | 1976-10-29 | 1976-10-29 | Breaking method for semiconductor wafer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13108176A JPS5355960A (en) | 1976-10-29 | 1976-10-29 | Breaking method for semiconductor wafer |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5355960A true JPS5355960A (en) | 1978-05-20 |
JPS5642139B2 JPS5642139B2 (en) | 1981-10-02 |
Family
ID=15049536
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13108176A Granted JPS5355960A (en) | 1976-10-29 | 1976-10-29 | Breaking method for semiconductor wafer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5355960A (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6383044U (en) * | 1986-10-01 | 1988-05-31 |
-
1976
- 1976-10-29 JP JP13108176A patent/JPS5355960A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5642139B2 (en) | 1981-10-02 |
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