JPS5353961A - Production of semiconductor wafer - Google Patents

Production of semiconductor wafer

Info

Publication number
JPS5353961A
JPS5353961A JP12825576A JP12825576A JPS5353961A JP S5353961 A JPS5353961 A JP S5353961A JP 12825576 A JP12825576 A JP 12825576A JP 12825576 A JP12825576 A JP 12825576A JP S5353961 A JPS5353961 A JP S5353961A
Authority
JP
Japan
Prior art keywords
production
semiconductor wafer
diffusion
poly
prevent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12825576A
Other languages
Japanese (ja)
Inventor
Taiji Usui
Susumu Matsuoka
Yutaka Oota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP12825576A priority Critical patent/JPS5353961A/en
Publication of JPS5353961A publication Critical patent/JPS5353961A/en
Pending legal-status Critical Current

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  • Element Separation (AREA)

Abstract

PURPOSE: To prevent the deformation of substrate at the formation and diffusion of thermal oxide films and prevent poly-Si from becoming a new diffusion source at the diffusion by laminating Si3N4 on poly-Si.
COPYRIGHT: (C)1978,JPO&Japio
JP12825576A 1976-10-27 1976-10-27 Production of semiconductor wafer Pending JPS5353961A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12825576A JPS5353961A (en) 1976-10-27 1976-10-27 Production of semiconductor wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12825576A JPS5353961A (en) 1976-10-27 1976-10-27 Production of semiconductor wafer

Publications (1)

Publication Number Publication Date
JPS5353961A true JPS5353961A (en) 1978-05-16

Family

ID=14980320

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12825576A Pending JPS5353961A (en) 1976-10-27 1976-10-27 Production of semiconductor wafer

Country Status (1)

Country Link
JP (1) JPS5353961A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5168188A (en) * 1974-12-11 1976-06-12 Hitachi Ltd JUDENTAIZETSUENBUNRIKI BANNOSEIHO

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5168188A (en) * 1974-12-11 1976-06-12 Hitachi Ltd JUDENTAIZETSUENBUNRIKI BANNOSEIHO

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