JPS5353961A - Production of semiconductor wafer - Google Patents
Production of semiconductor waferInfo
- Publication number
- JPS5353961A JPS5353961A JP12825576A JP12825576A JPS5353961A JP S5353961 A JPS5353961 A JP S5353961A JP 12825576 A JP12825576 A JP 12825576A JP 12825576 A JP12825576 A JP 12825576A JP S5353961 A JPS5353961 A JP S5353961A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor wafer
- diffusion
- poly
- prevent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Element Separation (AREA)
Abstract
PURPOSE: To prevent the deformation of substrate at the formation and diffusion of thermal oxide films and prevent poly-Si from becoming a new diffusion source at the diffusion by laminating Si3N4 on poly-Si.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12825576A JPS5353961A (en) | 1976-10-27 | 1976-10-27 | Production of semiconductor wafer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12825576A JPS5353961A (en) | 1976-10-27 | 1976-10-27 | Production of semiconductor wafer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5353961A true JPS5353961A (en) | 1978-05-16 |
Family
ID=14980320
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12825576A Pending JPS5353961A (en) | 1976-10-27 | 1976-10-27 | Production of semiconductor wafer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5353961A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5168188A (en) * | 1974-12-11 | 1976-06-12 | Hitachi Ltd | JUDENTAIZETSUENBUNRIKI BANNOSEIHO |
-
1976
- 1976-10-27 JP JP12825576A patent/JPS5353961A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5168188A (en) * | 1974-12-11 | 1976-06-12 | Hitachi Ltd | JUDENTAIZETSUENBUNRIKI BANNOSEIHO |
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