JPS5348791A - Production of infrared ray detector - Google Patents

Production of infrared ray detector

Info

Publication number
JPS5348791A
JPS5348791A JP12281776A JP12281776A JPS5348791A JP S5348791 A JPS5348791 A JP S5348791A JP 12281776 A JP12281776 A JP 12281776A JP 12281776 A JP12281776 A JP 12281776A JP S5348791 A JPS5348791 A JP S5348791A
Authority
JP
Japan
Prior art keywords
infrared ray
ray detector
production
conductible
doesn
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12281776A
Other languages
Japanese (ja)
Other versions
JPS5924370B2 (en
Inventor
Hiroji Kawakami
Osamu Asai
Masanobu Hanazono
Naoyuki Izaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12281776A priority Critical patent/JPS5924370B2/en
Publication of JPS5348791A publication Critical patent/JPS5348791A/en
Publication of JPS5924370B2 publication Critical patent/JPS5924370B2/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Radiation Pyrometers (AREA)

Abstract

PURPOSE:To make it possible to easily mass-produce the infrared ray detector which has high sensibility and rapid response rate and doesn't generate noise voltage by laying the specified conductible thin film on the inorganic base plate of electric insulator so as to be thermally separated each other.
JP12281776A 1976-10-15 1976-10-15 Infrared detector manufacturing method Expired JPS5924370B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12281776A JPS5924370B2 (en) 1976-10-15 1976-10-15 Infrared detector manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12281776A JPS5924370B2 (en) 1976-10-15 1976-10-15 Infrared detector manufacturing method

Publications (2)

Publication Number Publication Date
JPS5348791A true JPS5348791A (en) 1978-05-02
JPS5924370B2 JPS5924370B2 (en) 1984-06-08

Family

ID=14845360

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12281776A Expired JPS5924370B2 (en) 1976-10-15 1976-10-15 Infrared detector manufacturing method

Country Status (1)

Country Link
JP (1) JPS5924370B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0025529A2 (en) * 1979-09-12 1981-03-25 Battelle-Institut e.V. Bolometric radiation receiver and process for its production
JPS5798824A (en) * 1980-12-12 1982-06-19 Mitsuteru Kimura Infrared ray detector

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0025529A2 (en) * 1979-09-12 1981-03-25 Battelle-Institut e.V. Bolometric radiation receiver and process for its production
JPS5798824A (en) * 1980-12-12 1982-06-19 Mitsuteru Kimura Infrared ray detector

Also Published As

Publication number Publication date
JPS5924370B2 (en) 1984-06-08

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