JPS5343473A - Impurity driving-in method - Google Patents
Impurity driving-in methodInfo
- Publication number
- JPS5343473A JPS5343473A JP11818176A JP11818176A JPS5343473A JP S5343473 A JPS5343473 A JP S5343473A JP 11818176 A JP11818176 A JP 11818176A JP 11818176 A JP11818176 A JP 11818176A JP S5343473 A JPS5343473 A JP S5343473A
- Authority
- JP
- Japan
- Prior art keywords
- driving
- impurity
- impurity driving
- damage
- producing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To perform driving-in of not lowering surface concentration without producing any damage on wafer surfaces by performing heat treatment in an inert gas containing a slight amount of oxidative gas.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11818176A JPS5343473A (en) | 1976-09-30 | 1976-09-30 | Impurity driving-in method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11818176A JPS5343473A (en) | 1976-09-30 | 1976-09-30 | Impurity driving-in method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5343473A true JPS5343473A (en) | 1978-04-19 |
Family
ID=14730134
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11818176A Pending JPS5343473A (en) | 1976-09-30 | 1976-09-30 | Impurity driving-in method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5343473A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS577121A (en) * | 1980-06-17 | 1982-01-14 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS5927524A (en) * | 1982-08-07 | 1984-02-14 | Mitsubishi Electric Corp | Fabrication of semiconductor device |
JPS59108316A (en) * | 1982-12-14 | 1984-06-22 | Fuji Electric Corp Res & Dev Ltd | Manufacture of semiconductor device |
JPS63114121A (en) * | 1986-07-07 | 1988-05-19 | Nec Corp | Manufacture of semiconductor device |
-
1976
- 1976-09-30 JP JP11818176A patent/JPS5343473A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS577121A (en) * | 1980-06-17 | 1982-01-14 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS6258529B2 (en) * | 1980-06-17 | 1987-12-07 | Fujitsu Ltd | |
JPS5927524A (en) * | 1982-08-07 | 1984-02-14 | Mitsubishi Electric Corp | Fabrication of semiconductor device |
JPS59108316A (en) * | 1982-12-14 | 1984-06-22 | Fuji Electric Corp Res & Dev Ltd | Manufacture of semiconductor device |
JPS63114121A (en) * | 1986-07-07 | 1988-05-19 | Nec Corp | Manufacture of semiconductor device |
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