JPS5242367A - Method of preventing occurence of crystal defects of silicon wafers - Google Patents
Method of preventing occurence of crystal defects of silicon wafersInfo
- Publication number
- JPS5242367A JPS5242367A JP11814475A JP11814475A JPS5242367A JP S5242367 A JPS5242367 A JP S5242367A JP 11814475 A JP11814475 A JP 11814475A JP 11814475 A JP11814475 A JP 11814475A JP S5242367 A JPS5242367 A JP S5242367A
- Authority
- JP
- Japan
- Prior art keywords
- crystal defects
- silicon wafers
- occurence
- preventing
- preventing occurence
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: To prevent occurence of crystal defects by heat treatment after causing strain to be produced in the rear of wafers.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11814475A JPS5242367A (en) | 1975-09-30 | 1975-09-30 | Method of preventing occurence of crystal defects of silicon wafers |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11814475A JPS5242367A (en) | 1975-09-30 | 1975-09-30 | Method of preventing occurence of crystal defects of silicon wafers |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5242367A true JPS5242367A (en) | 1977-04-01 |
Family
ID=14729151
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11814475A Pending JPS5242367A (en) | 1975-09-30 | 1975-09-30 | Method of preventing occurence of crystal defects of silicon wafers |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5242367A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54110783A (en) * | 1978-02-20 | 1979-08-30 | Hitachi Ltd | Semiconductor substrate and its manufacture |
JPH0664463U (en) * | 1993-02-23 | 1994-09-13 | 和彦 湯川 | Electric reel fishing tackle |
-
1975
- 1975-09-30 JP JP11814475A patent/JPS5242367A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54110783A (en) * | 1978-02-20 | 1979-08-30 | Hitachi Ltd | Semiconductor substrate and its manufacture |
JPH0664463U (en) * | 1993-02-23 | 1994-09-13 | 和彦 湯川 | Electric reel fishing tackle |
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