JPS5325101A - Method of producing optical mask - Google Patents
Method of producing optical maskInfo
- Publication number
- JPS5325101A JPS5325101A JP9909876A JP9909876A JPS5325101A JP S5325101 A JPS5325101 A JP S5325101A JP 9909876 A JP9909876 A JP 9909876A JP 9909876 A JP9909876 A JP 9909876A JP S5325101 A JPS5325101 A JP S5325101A
- Authority
- JP
- Japan
- Prior art keywords
- optical mask
- producing optical
- producing
- mask
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9909876A JPS5325101A (en) | 1976-08-18 | 1976-08-18 | Method of producing optical mask |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9909876A JPS5325101A (en) | 1976-08-18 | 1976-08-18 | Method of producing optical mask |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5325101A true JPS5325101A (en) | 1978-03-08 |
Family
ID=14238380
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9909876A Pending JPS5325101A (en) | 1976-08-18 | 1976-08-18 | Method of producing optical mask |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5325101A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63310328A (en) * | 1987-06-08 | 1988-12-19 | Shimizu Constr Co Ltd | Power limiting apparatus for transformer |
-
1976
- 1976-08-18 JP JP9909876A patent/JPS5325101A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63310328A (en) * | 1987-06-08 | 1988-12-19 | Shimizu Constr Co Ltd | Power limiting apparatus for transformer |
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