JPS5325101A - Method of producing optical mask - Google Patents

Method of producing optical mask

Info

Publication number
JPS5325101A
JPS5325101A JP9909876A JP9909876A JPS5325101A JP S5325101 A JPS5325101 A JP S5325101A JP 9909876 A JP9909876 A JP 9909876A JP 9909876 A JP9909876 A JP 9909876A JP S5325101 A JPS5325101 A JP S5325101A
Authority
JP
Japan
Prior art keywords
optical mask
producing optical
producing
mask
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9909876A
Other languages
Japanese (ja)
Inventor
Tadahiro Hashimoto
Toshio Oguchi
Yasushi Okuyama
Mototaka Kamoshita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP9909876A priority Critical patent/JPS5325101A/en
Publication of JPS5325101A publication Critical patent/JPS5325101A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP9909876A 1976-08-18 1976-08-18 Method of producing optical mask Pending JPS5325101A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9909876A JPS5325101A (en) 1976-08-18 1976-08-18 Method of producing optical mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9909876A JPS5325101A (en) 1976-08-18 1976-08-18 Method of producing optical mask

Publications (1)

Publication Number Publication Date
JPS5325101A true JPS5325101A (en) 1978-03-08

Family

ID=14238380

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9909876A Pending JPS5325101A (en) 1976-08-18 1976-08-18 Method of producing optical mask

Country Status (1)

Country Link
JP (1) JPS5325101A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63310328A (en) * 1987-06-08 1988-12-19 Shimizu Constr Co Ltd Power limiting apparatus for transformer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63310328A (en) * 1987-06-08 1988-12-19 Shimizu Constr Co Ltd Power limiting apparatus for transformer

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