JPS5323307A - Manufacture of betaaalumina thin films - Google Patents
Manufacture of betaaalumina thin filmsInfo
- Publication number
- JPS5323307A JPS5323307A JP9840276A JP9840276A JPS5323307A JP S5323307 A JPS5323307 A JP S5323307A JP 9840276 A JP9840276 A JP 9840276A JP 9840276 A JP9840276 A JP 9840276A JP S5323307 A JPS5323307 A JP S5323307A
- Authority
- JP
- Japan
- Prior art keywords
- betaaalumina
- manufacture
- thin films
- films
- thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9840276A JPS5323307A (en) | 1976-08-17 | 1976-08-17 | Manufacture of betaaalumina thin films |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9840276A JPS5323307A (en) | 1976-08-17 | 1976-08-17 | Manufacture of betaaalumina thin films |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5323307A true JPS5323307A (en) | 1978-03-03 |
Family
ID=14218827
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9840276A Pending JPS5323307A (en) | 1976-08-17 | 1976-08-17 | Manufacture of betaaalumina thin films |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5323307A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5838111A (en) * | 1981-09-01 | 1983-03-05 | 三菱重工業株式会社 | Manufacture of ceramic sheet |
-
1976
- 1976-08-17 JP JP9840276A patent/JPS5323307A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5838111A (en) * | 1981-09-01 | 1983-03-05 | 三菱重工業株式会社 | Manufacture of ceramic sheet |
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