JPS5323307A - Manufacture of betaaalumina thin films - Google Patents

Manufacture of betaaalumina thin films

Info

Publication number
JPS5323307A
JPS5323307A JP9840276A JP9840276A JPS5323307A JP S5323307 A JPS5323307 A JP S5323307A JP 9840276 A JP9840276 A JP 9840276A JP 9840276 A JP9840276 A JP 9840276A JP S5323307 A JPS5323307 A JP S5323307A
Authority
JP
Japan
Prior art keywords
betaaalumina
manufacture
thin films
films
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9840276A
Other languages
Japanese (ja)
Inventor
Masaya Aoyanagi
Mikio Hayashi
Yoshio Tadokoro
Kazuo Hinoda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Chemical Co Ltd
Original Assignee
Sumitomo Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Chemical Co Ltd filed Critical Sumitomo Chemical Co Ltd
Priority to JP9840276A priority Critical patent/JPS5323307A/en
Publication of JPS5323307A publication Critical patent/JPS5323307A/en
Pending legal-status Critical Current

Links

JP9840276A 1976-08-17 1976-08-17 Manufacture of betaaalumina thin films Pending JPS5323307A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9840276A JPS5323307A (en) 1976-08-17 1976-08-17 Manufacture of betaaalumina thin films

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9840276A JPS5323307A (en) 1976-08-17 1976-08-17 Manufacture of betaaalumina thin films

Publications (1)

Publication Number Publication Date
JPS5323307A true JPS5323307A (en) 1978-03-03

Family

ID=14218827

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9840276A Pending JPS5323307A (en) 1976-08-17 1976-08-17 Manufacture of betaaalumina thin films

Country Status (1)

Country Link
JP (1) JPS5323307A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5838111A (en) * 1981-09-01 1983-03-05 三菱重工業株式会社 Manufacture of ceramic sheet

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5838111A (en) * 1981-09-01 1983-03-05 三菱重工業株式会社 Manufacture of ceramic sheet

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