JPS5320873A - Semiconductor integrated circuit device - Google Patents

Semiconductor integrated circuit device

Info

Publication number
JPS5320873A
JPS5320873A JP9483276A JP9483276A JPS5320873A JP S5320873 A JPS5320873 A JP S5320873A JP 9483276 A JP9483276 A JP 9483276A JP 9483276 A JP9483276 A JP 9483276A JP S5320873 A JPS5320873 A JP S5320873A
Authority
JP
Japan
Prior art keywords
integrated circuit
semiconductor integrated
circuit device
burying
insulator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9483276A
Other languages
Japanese (ja)
Inventor
Hisayuki Higuchi
Keijiro Uehara
Yoichi Tamaoki
Mitsuo Nanba
Koji Honma
Takahide Ikeda
Michiyoshi Maki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9483276A priority Critical patent/JPS5320873A/en
Publication of JPS5320873A publication Critical patent/JPS5320873A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To increase the scale of integration and reduce the parasitic capacity between each element by isolating between elements by burying an insulator in deep grooves and by burying an insulator in shallow grooves and leaving electrical connections.
COPYRIGHT: (C)1978,JPO&Japio
JP9483276A 1976-08-11 1976-08-11 Semiconductor integrated circuit device Pending JPS5320873A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9483276A JPS5320873A (en) 1976-08-11 1976-08-11 Semiconductor integrated circuit device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9483276A JPS5320873A (en) 1976-08-11 1976-08-11 Semiconductor integrated circuit device

Publications (1)

Publication Number Publication Date
JPS5320873A true JPS5320873A (en) 1978-02-25

Family

ID=14121008

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9483276A Pending JPS5320873A (en) 1976-08-11 1976-08-11 Semiconductor integrated circuit device

Country Status (1)

Country Link
JP (1) JPS5320873A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59217339A (en) * 1983-05-26 1984-12-07 Toshiba Corp Manufacture of semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59217339A (en) * 1983-05-26 1984-12-07 Toshiba Corp Manufacture of semiconductor device
JPH0562463B2 (en) * 1983-05-26 1993-09-08 Tokyo Shibaura Electric Co

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