JPS5320873A - Semiconductor integrated circuit device - Google Patents
Semiconductor integrated circuit deviceInfo
- Publication number
- JPS5320873A JPS5320873A JP9483276A JP9483276A JPS5320873A JP S5320873 A JPS5320873 A JP S5320873A JP 9483276 A JP9483276 A JP 9483276A JP 9483276 A JP9483276 A JP 9483276A JP S5320873 A JPS5320873 A JP S5320873A
- Authority
- JP
- Japan
- Prior art keywords
- integrated circuit
- semiconductor integrated
- circuit device
- burying
- insulator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Element Separation (AREA)
Abstract
PURPOSE: To increase the scale of integration and reduce the parasitic capacity between each element by isolating between elements by burying an insulator in deep grooves and by burying an insulator in shallow grooves and leaving electrical connections.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9483276A JPS5320873A (en) | 1976-08-11 | 1976-08-11 | Semiconductor integrated circuit device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9483276A JPS5320873A (en) | 1976-08-11 | 1976-08-11 | Semiconductor integrated circuit device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5320873A true JPS5320873A (en) | 1978-02-25 |
Family
ID=14121008
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9483276A Pending JPS5320873A (en) | 1976-08-11 | 1976-08-11 | Semiconductor integrated circuit device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5320873A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59217339A (en) * | 1983-05-26 | 1984-12-07 | Toshiba Corp | Manufacture of semiconductor device |
-
1976
- 1976-08-11 JP JP9483276A patent/JPS5320873A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59217339A (en) * | 1983-05-26 | 1984-12-07 | Toshiba Corp | Manufacture of semiconductor device |
JPH0562463B2 (en) * | 1983-05-26 | 1993-09-08 | Tokyo Shibaura Electric Co |
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