JPS5320763A - Crystal growing method and apparatus - Google Patents
Crystal growing method and apparatusInfo
- Publication number
- JPS5320763A JPS5320763A JP9448476A JP9448476A JPS5320763A JP S5320763 A JPS5320763 A JP S5320763A JP 9448476 A JP9448476 A JP 9448476A JP 9448476 A JP9448476 A JP 9448476A JP S5320763 A JPS5320763 A JP S5320763A
- Authority
- JP
- Japan
- Prior art keywords
- crystal growing
- gas system
- growing method
- crystal
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: To obtain a uniform crystal by providing an etching gas system separately from a crystal growing gas system within the same reaction tube, and first etching wafers in the etching gas system thereafter moving the wafers to the crystal growing gas system and performing crystal growth.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9448476A JPS5320763A (en) | 1976-08-10 | 1976-08-10 | Crystal growing method and apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9448476A JPS5320763A (en) | 1976-08-10 | 1976-08-10 | Crystal growing method and apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5320763A true JPS5320763A (en) | 1978-02-25 |
JPS5515856B2 JPS5515856B2 (en) | 1980-04-26 |
Family
ID=14111544
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9448476A Granted JPS5320763A (en) | 1976-08-10 | 1976-08-10 | Crystal growing method and apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5320763A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49120416A (en) * | 1973-03-22 | 1974-11-18 | ||
JPS6065793A (en) * | 1983-09-22 | 1985-04-15 | Matsushita Electric Ind Co Ltd | Vapor-phase growing method |
JPH05133009A (en) * | 1991-10-31 | 1993-05-28 | Misawa Homes Co Ltd | Structure of medium height building |
JPH05140993A (en) * | 1991-11-19 | 1993-06-08 | Misawa Homes Co Ltd | Structure of medium/high multistorey building |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58187014A (en) * | 1982-04-26 | 1983-11-01 | Nec Corp | Active filter circuit |
-
1976
- 1976-08-10 JP JP9448476A patent/JPS5320763A/en active Granted
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49120416A (en) * | 1973-03-22 | 1974-11-18 | ||
JPS569625B2 (en) * | 1973-03-22 | 1981-03-03 | ||
JPS6065793A (en) * | 1983-09-22 | 1985-04-15 | Matsushita Electric Ind Co Ltd | Vapor-phase growing method |
JPH0451520B2 (en) * | 1983-09-22 | 1992-08-19 | Matsushita Electric Ind Co Ltd | |
JPH05133009A (en) * | 1991-10-31 | 1993-05-28 | Misawa Homes Co Ltd | Structure of medium height building |
JPH05140993A (en) * | 1991-11-19 | 1993-06-08 | Misawa Homes Co Ltd | Structure of medium/high multistorey building |
Also Published As
Publication number | Publication date |
---|---|
JPS5515856B2 (en) | 1980-04-26 |
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