JPS5320763A - Crystal growing method and apparatus - Google Patents

Crystal growing method and apparatus

Info

Publication number
JPS5320763A
JPS5320763A JP9448476A JP9448476A JPS5320763A JP S5320763 A JPS5320763 A JP S5320763A JP 9448476 A JP9448476 A JP 9448476A JP 9448476 A JP9448476 A JP 9448476A JP S5320763 A JPS5320763 A JP S5320763A
Authority
JP
Japan
Prior art keywords
crystal growing
gas system
growing method
crystal
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9448476A
Other languages
Japanese (ja)
Other versions
JPS5515856B2 (en
Inventor
Tatsuo Aoki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP9448476A priority Critical patent/JPS5320763A/en
Publication of JPS5320763A publication Critical patent/JPS5320763A/en
Publication of JPS5515856B2 publication Critical patent/JPS5515856B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE: To obtain a uniform crystal by providing an etching gas system separately from a crystal growing gas system within the same reaction tube, and first etching wafers in the etching gas system thereafter moving the wafers to the crystal growing gas system and performing crystal growth.
COPYRIGHT: (C)1978,JPO&Japio
JP9448476A 1976-08-10 1976-08-10 Crystal growing method and apparatus Granted JPS5320763A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9448476A JPS5320763A (en) 1976-08-10 1976-08-10 Crystal growing method and apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9448476A JPS5320763A (en) 1976-08-10 1976-08-10 Crystal growing method and apparatus

Publications (2)

Publication Number Publication Date
JPS5320763A true JPS5320763A (en) 1978-02-25
JPS5515856B2 JPS5515856B2 (en) 1980-04-26

Family

ID=14111544

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9448476A Granted JPS5320763A (en) 1976-08-10 1976-08-10 Crystal growing method and apparatus

Country Status (1)

Country Link
JP (1) JPS5320763A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49120416A (en) * 1973-03-22 1974-11-18
JPS6065793A (en) * 1983-09-22 1985-04-15 Matsushita Electric Ind Co Ltd Vapor-phase growing method
JPH05133009A (en) * 1991-10-31 1993-05-28 Misawa Homes Co Ltd Structure of medium height building
JPH05140993A (en) * 1991-11-19 1993-06-08 Misawa Homes Co Ltd Structure of medium/high multistorey building

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58187014A (en) * 1982-04-26 1983-11-01 Nec Corp Active filter circuit

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49120416A (en) * 1973-03-22 1974-11-18
JPS569625B2 (en) * 1973-03-22 1981-03-03
JPS6065793A (en) * 1983-09-22 1985-04-15 Matsushita Electric Ind Co Ltd Vapor-phase growing method
JPH0451520B2 (en) * 1983-09-22 1992-08-19 Matsushita Electric Ind Co Ltd
JPH05133009A (en) * 1991-10-31 1993-05-28 Misawa Homes Co Ltd Structure of medium height building
JPH05140993A (en) * 1991-11-19 1993-06-08 Misawa Homes Co Ltd Structure of medium/high multistorey building

Also Published As

Publication number Publication date
JPS5515856B2 (en) 1980-04-26

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