JPS5317583A - Process for forming vacuum evaporation layer on largeesized substrate surface - Google Patents

Process for forming vacuum evaporation layer on largeesized substrate surface

Info

Publication number
JPS5317583A
JPS5317583A JP9267276A JP9267276A JPS5317583A JP S5317583 A JPS5317583 A JP S5317583A JP 9267276 A JP9267276 A JP 9267276A JP 9267276 A JP9267276 A JP 9267276A JP S5317583 A JPS5317583 A JP S5317583A
Authority
JP
Japan
Prior art keywords
largeesized
substrate surface
vacuum evaporation
evaporation layer
forming vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9267276A
Other languages
Japanese (ja)
Inventor
Kenzou Souno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Sheet Glass Co Ltd
Original Assignee
Nippon Sheet Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Sheet Glass Co Ltd filed Critical Nippon Sheet Glass Co Ltd
Priority to JP9267276A priority Critical patent/JPS5317583A/en
Publication of JPS5317583A publication Critical patent/JPS5317583A/en
Pending legal-status Critical Current

Links

JP9267276A 1976-08-02 1976-08-02 Process for forming vacuum evaporation layer on largeesized substrate surface Pending JPS5317583A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9267276A JPS5317583A (en) 1976-08-02 1976-08-02 Process for forming vacuum evaporation layer on largeesized substrate surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9267276A JPS5317583A (en) 1976-08-02 1976-08-02 Process for forming vacuum evaporation layer on largeesized substrate surface

Publications (1)

Publication Number Publication Date
JPS5317583A true JPS5317583A (en) 1978-02-17

Family

ID=14060963

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9267276A Pending JPS5317583A (en) 1976-08-02 1976-08-02 Process for forming vacuum evaporation layer on largeesized substrate surface

Country Status (1)

Country Link
JP (1) JPS5317583A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4514275A (en) * 1981-02-12 1985-04-30 Kabushiki Kaisha Toyota Chuo Kenkyusho Apparatus for physical vapor deposition
US5529815A (en) * 1994-11-03 1996-06-25 Lemelson; Jerome H. Apparatus and method for forming diamond coating
FR2839459A1 (en) * 2002-05-13 2003-11-14 Pvdco Reactor for the deposition of a metal or ceramic coating under a rarefied atmosphere which can be applied in a sealed manner over a predefined zone on the surface of a substrate
US7845548B2 (en) 2005-09-01 2010-12-07 Ho-Sup Kim Lamination method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4514275A (en) * 1981-02-12 1985-04-30 Kabushiki Kaisha Toyota Chuo Kenkyusho Apparatus for physical vapor deposition
US5529815A (en) * 1994-11-03 1996-06-25 Lemelson; Jerome H. Apparatus and method for forming diamond coating
FR2839459A1 (en) * 2002-05-13 2003-11-14 Pvdco Reactor for the deposition of a metal or ceramic coating under a rarefied atmosphere which can be applied in a sealed manner over a predefined zone on the surface of a substrate
US7845548B2 (en) 2005-09-01 2010-12-07 Ho-Sup Kim Lamination method

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