JPS53144258A - Production method for semiconductor wafer - Google Patents
Production method for semiconductor waferInfo
- Publication number
- JPS53144258A JPS53144258A JP5895577A JP5895577A JPS53144258A JP S53144258 A JPS53144258 A JP S53144258A JP 5895577 A JP5895577 A JP 5895577A JP 5895577 A JP5895577 A JP 5895577A JP S53144258 A JPS53144258 A JP S53144258A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- production method
- wafer
- stains
- injury
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
PURPOSE: To facilitate the handling as well as to avoid the stains or injury on the surface by forming a wafer aggregate which is coupled via part of the semiconductor wafer.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5895577A JPS53144258A (en) | 1977-05-21 | 1977-05-21 | Production method for semiconductor wafer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5895577A JPS53144258A (en) | 1977-05-21 | 1977-05-21 | Production method for semiconductor wafer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53144258A true JPS53144258A (en) | 1978-12-15 |
Family
ID=13099251
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5895577A Pending JPS53144258A (en) | 1977-05-21 | 1977-05-21 | Production method for semiconductor wafer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53144258A (en) |
-
1977
- 1977-05-21 JP JP5895577A patent/JPS53144258A/en active Pending
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