JPS53128975A - Automatic focus control device for scanning type electron beam device and others - Google Patents
Automatic focus control device for scanning type electron beam device and othersInfo
- Publication number
- JPS53128975A JPS53128975A JP4395877A JP4395877A JPS53128975A JP S53128975 A JPS53128975 A JP S53128975A JP 4395877 A JP4395877 A JP 4395877A JP 4395877 A JP4395877 A JP 4395877A JP S53128975 A JPS53128975 A JP S53128975A
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- focus control
- type electron
- scanning type
- automatic focus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To increase the accuracy of the focus adjustment by performing in-focus detection through variation of the lens focus and obtaining the average value by repeating the above operation.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4395877A JPS608580B2 (en) | 1977-04-15 | 1977-04-15 | Automatic focus adjustment device for scanning electron beam equipment, etc. |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4395877A JPS608580B2 (en) | 1977-04-15 | 1977-04-15 | Automatic focus adjustment device for scanning electron beam equipment, etc. |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53128975A true JPS53128975A (en) | 1978-11-10 |
JPS608580B2 JPS608580B2 (en) | 1985-03-04 |
Family
ID=12678204
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4395877A Expired JPS608580B2 (en) | 1977-04-15 | 1977-04-15 | Automatic focus adjustment device for scanning electron beam equipment, etc. |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS608580B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6054152A (en) * | 1983-09-02 | 1985-03-28 | Hitachi Ltd | Method of automatically controlling focus in electron ray device |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6439986U (en) * | 1987-09-07 | 1989-03-09 |
-
1977
- 1977-04-15 JP JP4395877A patent/JPS608580B2/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6054152A (en) * | 1983-09-02 | 1985-03-28 | Hitachi Ltd | Method of automatically controlling focus in electron ray device |
Also Published As
Publication number | Publication date |
---|---|
JPS608580B2 (en) | 1985-03-04 |
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