JPS53128975A - Automatic focus control device for scanning type electron beam device and others - Google Patents

Automatic focus control device for scanning type electron beam device and others

Info

Publication number
JPS53128975A
JPS53128975A JP4395877A JP4395877A JPS53128975A JP S53128975 A JPS53128975 A JP S53128975A JP 4395877 A JP4395877 A JP 4395877A JP 4395877 A JP4395877 A JP 4395877A JP S53128975 A JPS53128975 A JP S53128975A
Authority
JP
Japan
Prior art keywords
electron beam
focus control
type electron
scanning type
automatic focus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4395877A
Other languages
Japanese (ja)
Other versions
JPS608580B2 (en
Inventor
Gen Date
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP4395877A priority Critical patent/JPS608580B2/en
Publication of JPS53128975A publication Critical patent/JPS53128975A/en
Publication of JPS608580B2 publication Critical patent/JPS608580B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To increase the accuracy of the focus adjustment by performing in-focus detection through variation of the lens focus and obtaining the average value by repeating the above operation.
COPYRIGHT: (C)1978,JPO&Japio
JP4395877A 1977-04-15 1977-04-15 Automatic focus adjustment device for scanning electron beam equipment, etc. Expired JPS608580B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4395877A JPS608580B2 (en) 1977-04-15 1977-04-15 Automatic focus adjustment device for scanning electron beam equipment, etc.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4395877A JPS608580B2 (en) 1977-04-15 1977-04-15 Automatic focus adjustment device for scanning electron beam equipment, etc.

Publications (2)

Publication Number Publication Date
JPS53128975A true JPS53128975A (en) 1978-11-10
JPS608580B2 JPS608580B2 (en) 1985-03-04

Family

ID=12678204

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4395877A Expired JPS608580B2 (en) 1977-04-15 1977-04-15 Automatic focus adjustment device for scanning electron beam equipment, etc.

Country Status (1)

Country Link
JP (1) JPS608580B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6054152A (en) * 1983-09-02 1985-03-28 Hitachi Ltd Method of automatically controlling focus in electron ray device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6439986U (en) * 1987-09-07 1989-03-09

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6054152A (en) * 1983-09-02 1985-03-28 Hitachi Ltd Method of automatically controlling focus in electron ray device

Also Published As

Publication number Publication date
JPS608580B2 (en) 1985-03-04

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