JPS5298634A - Method of etching stratified films - Google Patents
Method of etching stratified filmsInfo
- Publication number
- JPS5298634A JPS5298634A JP1485276A JP1485276A JPS5298634A JP S5298634 A JPS5298634 A JP S5298634A JP 1485276 A JP1485276 A JP 1485276A JP 1485276 A JP1485276 A JP 1485276A JP S5298634 A JPS5298634 A JP S5298634A
- Authority
- JP
- Japan
- Prior art keywords
- etching
- stratified films
- films
- etching stratified
- stratified
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1485276A JPS5298634A (en) | 1976-02-16 | 1976-02-16 | Method of etching stratified films |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1485276A JPS5298634A (en) | 1976-02-16 | 1976-02-16 | Method of etching stratified films |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5298634A true JPS5298634A (en) | 1977-08-18 |
Family
ID=11872554
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1485276A Pending JPS5298634A (en) | 1976-02-16 | 1976-02-16 | Method of etching stratified films |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5298634A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6454360U (en) * | 1988-09-07 | 1989-04-04 | ||
JPH01150383A (en) * | 1987-12-07 | 1989-06-13 | Mitsutoyo Corp | Electrode body for pattern wiring |
-
1976
- 1976-02-16 JP JP1485276A patent/JPS5298634A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01150383A (en) * | 1987-12-07 | 1989-06-13 | Mitsutoyo Corp | Electrode body for pattern wiring |
JPS6454360U (en) * | 1988-09-07 | 1989-04-04 | ||
JPH02914Y2 (en) * | 1988-09-07 | 1990-01-10 |
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