JPS5289457A - Stereo scan type electron microscope - Google Patents

Stereo scan type electron microscope

Info

Publication number
JPS5289457A
JPS5289457A JP493376A JP493376A JPS5289457A JP S5289457 A JPS5289457 A JP S5289457A JP 493376 A JP493376 A JP 493376A JP 493376 A JP493376 A JP 493376A JP S5289457 A JPS5289457 A JP S5289457A
Authority
JP
Japan
Prior art keywords
electron microscope
scan type
type electron
stereo
stereo scan
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP493376A
Other languages
Japanese (ja)
Inventor
Shozo Kasai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP493376A priority Critical patent/JPS5289457A/en
Publication of JPS5289457A publication Critical patent/JPS5289457A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)

Abstract

PURPOSE: To enable stereoscopic observation without degrading high resolution of a scan type electron microscope by arranging a deflection device for stereo in the opposite side of the electron gun against a sample.
COPYRIGHT: (C)1977,JPO&Japio
JP493376A 1976-01-21 1976-01-21 Stereo scan type electron microscope Pending JPS5289457A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP493376A JPS5289457A (en) 1976-01-21 1976-01-21 Stereo scan type electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP493376A JPS5289457A (en) 1976-01-21 1976-01-21 Stereo scan type electron microscope

Publications (1)

Publication Number Publication Date
JPS5289457A true JPS5289457A (en) 1977-07-27

Family

ID=11597370

Family Applications (1)

Application Number Title Priority Date Filing Date
JP493376A Pending JPS5289457A (en) 1976-01-21 1976-01-21 Stereo scan type electron microscope

Country Status (1)

Country Link
JP (1) JPS5289457A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0949652A1 (en) * 1998-03-24 1999-10-13 Institut für Festkörper- und Werkstofforschung Dresden e.V. Method of generating real-time stereo images of specimens using a scanning particle microscope

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0949652A1 (en) * 1998-03-24 1999-10-13 Institut für Festkörper- und Werkstofforschung Dresden e.V. Method of generating real-time stereo images of specimens using a scanning particle microscope

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