JPS5289457A - Stereo scan type electron microscope - Google Patents
Stereo scan type electron microscopeInfo
- Publication number
- JPS5289457A JPS5289457A JP493376A JP493376A JPS5289457A JP S5289457 A JPS5289457 A JP S5289457A JP 493376 A JP493376 A JP 493376A JP 493376 A JP493376 A JP 493376A JP S5289457 A JPS5289457 A JP S5289457A
- Authority
- JP
- Japan
- Prior art keywords
- electron microscope
- scan type
- type electron
- stereo
- stereo scan
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
Abstract
PURPOSE: To enable stereoscopic observation without degrading high resolution of a scan type electron microscope by arranging a deflection device for stereo in the opposite side of the electron gun against a sample.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP493376A JPS5289457A (en) | 1976-01-21 | 1976-01-21 | Stereo scan type electron microscope |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP493376A JPS5289457A (en) | 1976-01-21 | 1976-01-21 | Stereo scan type electron microscope |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5289457A true JPS5289457A (en) | 1977-07-27 |
Family
ID=11597370
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP493376A Pending JPS5289457A (en) | 1976-01-21 | 1976-01-21 | Stereo scan type electron microscope |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5289457A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0949652A1 (en) * | 1998-03-24 | 1999-10-13 | Institut für Festkörper- und Werkstofforschung Dresden e.V. | Method of generating real-time stereo images of specimens using a scanning particle microscope |
-
1976
- 1976-01-21 JP JP493376A patent/JPS5289457A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0949652A1 (en) * | 1998-03-24 | 1999-10-13 | Institut für Festkörper- und Werkstofforschung Dresden e.V. | Method of generating real-time stereo images of specimens using a scanning particle microscope |
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