JPS5259569A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5259569A
JPS5259569A JP13579375A JP13579375A JPS5259569A JP S5259569 A JPS5259569 A JP S5259569A JP 13579375 A JP13579375 A JP 13579375A JP 13579375 A JP13579375 A JP 13579375A JP S5259569 A JPS5259569 A JP S5259569A
Authority
JP
Japan
Prior art keywords
semiconductor device
production
layer
over
depositong
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13579375A
Other languages
Japanese (ja)
Other versions
JPS5811731B2 (en
Inventor
Hiroshi Kuroda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP50135793A priority Critical patent/JPS5811731B2/en
Publication of JPS5259569A publication Critical patent/JPS5259569A/en
Publication of JPS5811731B2 publication Critical patent/JPS5811731B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: To eliminate contact failure in a semiconductor device of a high scale of integration by selectively opening holes in an insulating film over an impurity diffusion region, making an alloy layer on the exposed surface through deposition of a metal film and depositong an electrode over the layer.
COPYRIGHT: (C)1977,JPO&Japio
JP50135793A 1975-11-11 1975-11-11 hand tai souchi no seizou houhou Expired JPS5811731B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50135793A JPS5811731B2 (en) 1975-11-11 1975-11-11 hand tai souchi no seizou houhou

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50135793A JPS5811731B2 (en) 1975-11-11 1975-11-11 hand tai souchi no seizou houhou

Publications (2)

Publication Number Publication Date
JPS5259569A true JPS5259569A (en) 1977-05-17
JPS5811731B2 JPS5811731B2 (en) 1983-03-04

Family

ID=15159950

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50135793A Expired JPS5811731B2 (en) 1975-11-11 1975-11-11 hand tai souchi no seizou houhou

Country Status (1)

Country Link
JP (1) JPS5811731B2 (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51103770A (en) * 1975-03-10 1976-09-13 Fujitsu Ltd Handotaisochino seizohoho

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51103770A (en) * 1975-03-10 1976-09-13 Fujitsu Ltd Handotaisochino seizohoho

Also Published As

Publication number Publication date
JPS5811731B2 (en) 1983-03-04

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