JPS5259569A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5259569A JPS5259569A JP13579375A JP13579375A JPS5259569A JP S5259569 A JPS5259569 A JP S5259569A JP 13579375 A JP13579375 A JP 13579375A JP 13579375 A JP13579375 A JP 13579375A JP S5259569 A JPS5259569 A JP S5259569A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- production
- layer
- over
- depositong
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
Abstract
PURPOSE: To eliminate contact failure in a semiconductor device of a high scale of integration by selectively opening holes in an insulating film over an impurity diffusion region, making an alloy layer on the exposed surface through deposition of a metal film and depositong an electrode over the layer.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50135793A JPS5811731B2 (en) | 1975-11-11 | 1975-11-11 | hand tai souchi no seizou houhou |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50135793A JPS5811731B2 (en) | 1975-11-11 | 1975-11-11 | hand tai souchi no seizou houhou |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5259569A true JPS5259569A (en) | 1977-05-17 |
JPS5811731B2 JPS5811731B2 (en) | 1983-03-04 |
Family
ID=15159950
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50135793A Expired JPS5811731B2 (en) | 1975-11-11 | 1975-11-11 | hand tai souchi no seizou houhou |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5811731B2 (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51103770A (en) * | 1975-03-10 | 1976-09-13 | Fujitsu Ltd | Handotaisochino seizohoho |
-
1975
- 1975-11-11 JP JP50135793A patent/JPS5811731B2/en not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51103770A (en) * | 1975-03-10 | 1976-09-13 | Fujitsu Ltd | Handotaisochino seizohoho |
Also Published As
Publication number | Publication date |
---|---|
JPS5811731B2 (en) | 1983-03-04 |
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