JPS5245267A - Process for production of semiconductor device - Google Patents
Process for production of semiconductor deviceInfo
- Publication number
- JPS5245267A JPS5245267A JP50121498A JP12149875A JPS5245267A JP S5245267 A JPS5245267 A JP S5245267A JP 50121498 A JP50121498 A JP 50121498A JP 12149875 A JP12149875 A JP 12149875A JP S5245267 A JPS5245267 A JP S5245267A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- selection
- substances
- perform efficient
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Abstract
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50121498A JPS5245267A (en) | 1975-10-07 | 1975-10-07 | Process for production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50121498A JPS5245267A (en) | 1975-10-07 | 1975-10-07 | Process for production of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5245267A true JPS5245267A (en) | 1977-04-09 |
Family
ID=14812655
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50121498A Pending JPS5245267A (en) | 1975-10-07 | 1975-10-07 | Process for production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5245267A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8020458B2 (en) | 2006-05-09 | 2011-09-20 | Sumitomo Seika Chemicals Co., Ltd | Sample introducing system |
-
1975
- 1975-10-07 JP JP50121498A patent/JPS5245267A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8020458B2 (en) | 2006-05-09 | 2011-09-20 | Sumitomo Seika Chemicals Co., Ltd | Sample introducing system |
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