JPS51140471A - Device for washing semiconductor wafer - Google Patents

Device for washing semiconductor wafer

Info

Publication number
JPS51140471A
JPS51140471A JP50064297A JP6429775A JPS51140471A JP S51140471 A JPS51140471 A JP S51140471A JP 50064297 A JP50064297 A JP 50064297A JP 6429775 A JP6429775 A JP 6429775A JP S51140471 A JPS51140471 A JP S51140471A
Authority
JP
Japan
Prior art keywords
semiconductor wafer
washing semiconductor
washing
washability
eliminate irregularity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50064297A
Other languages
Japanese (ja)
Inventor
Toshio Nonaka
Kimio Muramatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50064297A priority Critical patent/JPS51140471A/en
Publication of JPS51140471A publication Critical patent/JPS51140471A/en
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)

Abstract

PURPOSE:To eliminate irregularity of washability in a device for washing a semiconductor wafer.
JP50064297A 1975-05-30 1975-05-30 Device for washing semiconductor wafer Pending JPS51140471A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50064297A JPS51140471A (en) 1975-05-30 1975-05-30 Device for washing semiconductor wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50064297A JPS51140471A (en) 1975-05-30 1975-05-30 Device for washing semiconductor wafer

Publications (1)

Publication Number Publication Date
JPS51140471A true JPS51140471A (en) 1976-12-03

Family

ID=13254158

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50064297A Pending JPS51140471A (en) 1975-05-30 1975-05-30 Device for washing semiconductor wafer

Country Status (1)

Country Link
JP (1) JPS51140471A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55153332A (en) * 1979-05-18 1980-11-29 Matsushita Electric Ind Co Ltd Manufacture of gallium arsenide semiconductor device
JPH0325936A (en) * 1989-06-16 1991-02-04 American Teleph & Telegr Co <Att> Cleaning of semiconductor wafer and device therefor
WO2014013536A1 (en) * 2012-07-17 2014-01-23 三洋電機株式会社 Solar cell manufacturing method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55153332A (en) * 1979-05-18 1980-11-29 Matsushita Electric Ind Co Ltd Manufacture of gallium arsenide semiconductor device
JPH0325936A (en) * 1989-06-16 1991-02-04 American Teleph & Telegr Co <Att> Cleaning of semiconductor wafer and device therefor
WO2014013536A1 (en) * 2012-07-17 2014-01-23 三洋電機株式会社 Solar cell manufacturing method

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Legal Events

Date Code Title Description
A131 Notification of reasons for refusal

Effective date: 20040127

Free format text: JAPANESE INTERMEDIATE CODE: A131

A761 Written withdrawal of application

Effective date: 20040329

Free format text: JAPANESE INTERMEDIATE CODE: A761