JPS51140471A - Device for washing semiconductor wafer - Google Patents
Device for washing semiconductor waferInfo
- Publication number
- JPS51140471A JPS51140471A JP50064297A JP6429775A JPS51140471A JP S51140471 A JPS51140471 A JP S51140471A JP 50064297 A JP50064297 A JP 50064297A JP 6429775 A JP6429775 A JP 6429775A JP S51140471 A JPS51140471 A JP S51140471A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- washing semiconductor
- washing
- washability
- eliminate irregularity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
Abstract
PURPOSE:To eliminate irregularity of washability in a device for washing a semiconductor wafer.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50064297A JPS51140471A (en) | 1975-05-30 | 1975-05-30 | Device for washing semiconductor wafer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50064297A JPS51140471A (en) | 1975-05-30 | 1975-05-30 | Device for washing semiconductor wafer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51140471A true JPS51140471A (en) | 1976-12-03 |
Family
ID=13254158
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50064297A Pending JPS51140471A (en) | 1975-05-30 | 1975-05-30 | Device for washing semiconductor wafer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51140471A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55153332A (en) * | 1979-05-18 | 1980-11-29 | Matsushita Electric Ind Co Ltd | Manufacture of gallium arsenide semiconductor device |
JPH0325936A (en) * | 1989-06-16 | 1991-02-04 | American Teleph & Telegr Co <Att> | Cleaning of semiconductor wafer and device therefor |
WO2014013536A1 (en) * | 2012-07-17 | 2014-01-23 | 三洋電機株式会社 | Solar cell manufacturing method |
-
1975
- 1975-05-30 JP JP50064297A patent/JPS51140471A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55153332A (en) * | 1979-05-18 | 1980-11-29 | Matsushita Electric Ind Co Ltd | Manufacture of gallium arsenide semiconductor device |
JPH0325936A (en) * | 1989-06-16 | 1991-02-04 | American Teleph & Telegr Co <Att> | Cleaning of semiconductor wafer and device therefor |
WO2014013536A1 (en) * | 2012-07-17 | 2014-01-23 | 三洋電機株式会社 | Solar cell manufacturing method |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A131 | Notification of reasons for refusal |
Effective date: 20040127 Free format text: JAPANESE INTERMEDIATE CODE: A131 |
|
A761 | Written withdrawal of application |
Effective date: 20040329 Free format text: JAPANESE INTERMEDIATE CODE: A761 |