JPS5363885A - Production apparatus of solid device - Google Patents
Production apparatus of solid deviceInfo
- Publication number
- JPS5363885A JPS5363885A JP13922376A JP13922376A JPS5363885A JP S5363885 A JPS5363885 A JP S5363885A JP 13922376 A JP13922376 A JP 13922376A JP 13922376 A JP13922376 A JP 13922376A JP S5363885 A JPS5363885 A JP S5363885A
- Authority
- JP
- Japan
- Prior art keywords
- production apparatus
- solid device
- solid
- improve
- elements
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Solid State Image Pick-Up Elements (AREA)
- Die Bonding (AREA)
- Light Receiving Elements (AREA)
Abstract
PURPOSE: To improve the manufacturing work efficiency of solid devices by making possible direct viewing of elements and vacuum chuck.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51139223A JPS5811755B2 (en) | 1976-11-18 | 1976-11-18 | Solid state device manufacturing equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51139223A JPS5811755B2 (en) | 1976-11-18 | 1976-11-18 | Solid state device manufacturing equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5363885A true JPS5363885A (en) | 1978-06-07 |
JPS5811755B2 JPS5811755B2 (en) | 1983-03-04 |
Family
ID=15240360
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP51139223A Expired JPS5811755B2 (en) | 1976-11-18 | 1976-11-18 | Solid state device manufacturing equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5811755B2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017163645A (en) | 2016-03-08 | 2017-09-14 | Ntn株式会社 | Vehicle driving device |
-
1976
- 1976-11-18 JP JP51139223A patent/JPS5811755B2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5811755B2 (en) | 1983-03-04 |
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