JPS5232271A - Inspection method and equipment for photomask pattern - Google Patents
Inspection method and equipment for photomask patternInfo
- Publication number
- JPS5232271A JPS5232271A JP10797875A JP10797875A JPS5232271A JP S5232271 A JPS5232271 A JP S5232271A JP 10797875 A JP10797875 A JP 10797875A JP 10797875 A JP10797875 A JP 10797875A JP S5232271 A JPS5232271 A JP S5232271A
- Authority
- JP
- Japan
- Prior art keywords
- equipment
- inspection method
- photomask pattern
- wheter
- photomasks
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE: To inspect easily in short time wheter or not thin films transmitting visible light are formed on photomasks as required.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10797875A JPS5232271A (en) | 1975-09-08 | 1975-09-08 | Inspection method and equipment for photomask pattern |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10797875A JPS5232271A (en) | 1975-09-08 | 1975-09-08 | Inspection method and equipment for photomask pattern |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5232271A true JPS5232271A (en) | 1977-03-11 |
Family
ID=14472872
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10797875A Pending JPS5232271A (en) | 1975-09-08 | 1975-09-08 | Inspection method and equipment for photomask pattern |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5232271A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58118731U (en) * | 1982-02-05 | 1983-08-13 | 株式会社日立製作所 | LSI inspection equipment |
-
1975
- 1975-09-08 JP JP10797875A patent/JPS5232271A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58118731U (en) * | 1982-02-05 | 1983-08-13 | 株式会社日立製作所 | LSI inspection equipment |
JPS633156Y2 (en) * | 1982-02-05 | 1988-01-26 |
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