JPS522174A - Self-matching etching process - Google Patents

Self-matching etching process

Info

Publication number
JPS522174A
JPS522174A JP7083075A JP7083075A JPS522174A JP S522174 A JPS522174 A JP S522174A JP 7083075 A JP7083075 A JP 7083075A JP 7083075 A JP7083075 A JP 7083075A JP S522174 A JPS522174 A JP S522174A
Authority
JP
Japan
Prior art keywords
etching process
self
matching
matching etching
mast
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7083075A
Other languages
Japanese (ja)
Other versions
JPS5638056B2 (en
Inventor
Hideo Sunami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7083075A priority Critical patent/JPS522174A/en
Publication of JPS522174A publication Critical patent/JPS522174A/en
Publication of JPS5638056B2 publication Critical patent/JPS5638056B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Weting (AREA)

Abstract

PURPOSE: To provide self-matching etching process which does not require mast matching at all by utilizing COD method.
COPYRIGHT: (C)1977,JPO&Japio
JP7083075A 1975-06-13 1975-06-13 Self-matching etching process Granted JPS522174A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7083075A JPS522174A (en) 1975-06-13 1975-06-13 Self-matching etching process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7083075A JPS522174A (en) 1975-06-13 1975-06-13 Self-matching etching process

Publications (2)

Publication Number Publication Date
JPS522174A true JPS522174A (en) 1977-01-08
JPS5638056B2 JPS5638056B2 (en) 1981-09-03

Family

ID=13442875

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7083075A Granted JPS522174A (en) 1975-06-13 1975-06-13 Self-matching etching process

Country Status (1)

Country Link
JP (1) JPS522174A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4506434A (en) * 1981-09-10 1985-03-26 Fujitsu Limited Method for production of semiconductor devices

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62118055U (en) * 1985-10-04 1987-07-27
JPH038181U (en) * 1990-06-11 1991-01-25

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4917973A (en) * 1972-06-07 1974-02-16

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4917973A (en) * 1972-06-07 1974-02-16

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4506434A (en) * 1981-09-10 1985-03-26 Fujitsu Limited Method for production of semiconductor devices

Also Published As

Publication number Publication date
JPS5638056B2 (en) 1981-09-03

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