JPS522174A - Self-matching etching process - Google Patents
Self-matching etching processInfo
- Publication number
- JPS522174A JPS522174A JP7083075A JP7083075A JPS522174A JP S522174 A JPS522174 A JP S522174A JP 7083075 A JP7083075 A JP 7083075A JP 7083075 A JP7083075 A JP 7083075A JP S522174 A JPS522174 A JP S522174A
- Authority
- JP
- Japan
- Prior art keywords
- etching process
- self
- matching
- matching etching
- mast
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Weting (AREA)
Abstract
PURPOSE: To provide self-matching etching process which does not require mast matching at all by utilizing COD method.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7083075A JPS522174A (en) | 1975-06-13 | 1975-06-13 | Self-matching etching process |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7083075A JPS522174A (en) | 1975-06-13 | 1975-06-13 | Self-matching etching process |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS522174A true JPS522174A (en) | 1977-01-08 |
JPS5638056B2 JPS5638056B2 (en) | 1981-09-03 |
Family
ID=13442875
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7083075A Granted JPS522174A (en) | 1975-06-13 | 1975-06-13 | Self-matching etching process |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS522174A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4506434A (en) * | 1981-09-10 | 1985-03-26 | Fujitsu Limited | Method for production of semiconductor devices |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62118055U (en) * | 1985-10-04 | 1987-07-27 | ||
JPH038181U (en) * | 1990-06-11 | 1991-01-25 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4917973A (en) * | 1972-06-07 | 1974-02-16 |
-
1975
- 1975-06-13 JP JP7083075A patent/JPS522174A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4917973A (en) * | 1972-06-07 | 1974-02-16 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4506434A (en) * | 1981-09-10 | 1985-03-26 | Fujitsu Limited | Method for production of semiconductor devices |
Also Published As
Publication number | Publication date |
---|---|
JPS5638056B2 (en) | 1981-09-03 |
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