JPS5244158A - Scanning electronic microscope - Google Patents

Scanning electronic microscope

Info

Publication number
JPS5244158A
JPS5244158A JP11886775A JP11886775A JPS5244158A JP S5244158 A JPS5244158 A JP S5244158A JP 11886775 A JP11886775 A JP 11886775A JP 11886775 A JP11886775 A JP 11886775A JP S5244158 A JPS5244158 A JP S5244158A
Authority
JP
Japan
Prior art keywords
electronic microscope
scanning electronic
electronic information
picture
secondary electronic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11886775A
Other languages
Japanese (ja)
Other versions
JPS5847827B2 (en
Inventor
Takashi Nagatani
Mitsuhiko Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50118867A priority Critical patent/JPS5847827B2/en
Publication of JPS5244158A publication Critical patent/JPS5244158A/en
Publication of JPS5847827B2 publication Critical patent/JPS5847827B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: As for scanning electronic microscope, the reflected electronic information contained in the secondary electronic information can be offset when the secondary electronic information is picture-displayed. In this way, a secondary electronic picture of high analysis capability can be secured.
COPYRIGHT: (C)1977,JPO&Japio
JP50118867A 1975-10-03 1975-10-03 Sosa Denshi Kenbikiyo Expired JPS5847827B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50118867A JPS5847827B2 (en) 1975-10-03 1975-10-03 Sosa Denshi Kenbikiyo

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50118867A JPS5847827B2 (en) 1975-10-03 1975-10-03 Sosa Denshi Kenbikiyo

Publications (2)

Publication Number Publication Date
JPS5244158A true JPS5244158A (en) 1977-04-06
JPS5847827B2 JPS5847827B2 (en) 1983-10-25

Family

ID=14747076

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50118867A Expired JPS5847827B2 (en) 1975-10-03 1975-10-03 Sosa Denshi Kenbikiyo

Country Status (1)

Country Link
JP (1) JPS5847827B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5857248A (en) * 1981-09-30 1983-04-05 Hitachi Ltd Scanning-type electron microscope
JPS5996759U (en) * 1982-12-21 1984-06-30 日本電子株式会社 Analysis equipment
JPS6077341A (en) * 1983-10-04 1985-05-01 Agency Of Ind Science & Technol Picture observation device
JPS63102148A (en) * 1986-10-17 1988-05-07 Akashi Seisakusho Co Ltd Electron beam equipment
JP2007165106A (en) * 2005-12-13 2007-06-28 Sanyu Electron Co Ltd Image generating method and apparatus

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4984361A (en) * 1972-12-18 1974-08-13
JPS49124964A (en) * 1973-04-02 1974-11-29

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4984361A (en) * 1972-12-18 1974-08-13
JPS49124964A (en) * 1973-04-02 1974-11-29

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5857248A (en) * 1981-09-30 1983-04-05 Hitachi Ltd Scanning-type electron microscope
JPH0232740B2 (en) * 1981-09-30 1990-07-23 Hitachi Ltd
JPS5996759U (en) * 1982-12-21 1984-06-30 日本電子株式会社 Analysis equipment
JPH0228611Y2 (en) * 1982-12-21 1990-07-31
JPS6077341A (en) * 1983-10-04 1985-05-01 Agency Of Ind Science & Technol Picture observation device
JPH0241862B2 (en) * 1983-10-04 1990-09-19
JPS63102148A (en) * 1986-10-17 1988-05-07 Akashi Seisakusho Co Ltd Electron beam equipment
JP2007165106A (en) * 2005-12-13 2007-06-28 Sanyu Electron Co Ltd Image generating method and apparatus

Also Published As

Publication number Publication date
JPS5847827B2 (en) 1983-10-25

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