JPS5213713B2 - - Google Patents
Info
- Publication number
- JPS5213713B2 JPS5213713B2 JP46100977A JP10097771A JPS5213713B2 JP S5213713 B2 JPS5213713 B2 JP S5213713B2 JP 46100977 A JP46100977 A JP 46100977A JP 10097771 A JP10097771 A JP 10097771A JP S5213713 B2 JPS5213713 B2 JP S5213713B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/10—Lenses
- H01J37/14—Lenses magnetic
- H01J37/141—Electromagnetic lenses
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
- H01J29/58—Arrangements for focusing or reflecting ray or beam
- H01J29/64—Magnetic lenses
- H01J29/66—Magnetic lenses using electromagnetic means only
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Beam Exposure (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP46100977A JPS5213713B2 (de) | 1971-12-15 | 1971-12-15 | |
| DE19722261497 DE2261497C3 (de) | 1971-12-15 | 1972-12-15 | Magnetische Verbundlinse |
| US00315455A US3851172A (en) | 1971-12-15 | 1972-12-15 | Compound electron lens for electron microscope and the like |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP46100977A JPS5213713B2 (de) | 1971-12-15 | 1971-12-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4866364A JPS4866364A (de) | 1973-09-11 |
| JPS5213713B2 true JPS5213713B2 (de) | 1977-04-16 |
Family
ID=14288392
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP46100977A Expired JPS5213713B2 (de) | 1971-12-15 | 1971-12-15 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US3851172A (de) |
| JP (1) | JPS5213713B2 (de) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55121540U (de) * | 1979-02-19 | 1980-08-28 | ||
| JPS5848823Y2 (ja) * | 1979-04-16 | 1983-11-08 | 東亜特殊電機株式会社 | 携帯用送信機 |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1420803A (en) * | 1973-06-28 | 1976-01-14 | Ass Elect Ind | Electron microscopes |
| JPS524746U (de) * | 1975-06-24 | 1977-01-13 | ||
| JPS52104359U (de) * | 1976-02-06 | 1977-08-08 | ||
| US4345152A (en) * | 1980-08-11 | 1982-08-17 | The Perkin-Elmer Corporation | Magnetic lens |
| JPS585956A (ja) * | 1981-07-01 | 1983-01-13 | Hitachi Ltd | 電子顕微鏡 |
| US4585942A (en) * | 1983-03-17 | 1986-04-29 | Jeol Ltd. | Transmission electron microscope |
| FR2597259A1 (fr) * | 1986-04-15 | 1987-10-16 | Thomson Csf | Dispositif a faisceau electronique pour projeter l'image d'un objet sur un echantillon |
| US5442182A (en) * | 1992-11-06 | 1995-08-15 | Hitachi, Ltd. | Electron lens |
| US6627899B2 (en) * | 1998-05-27 | 2003-09-30 | Nikon Corporation | Magnetic lenses, charged-particle-beam optical systems, and charged-particle-beam pattern-transfer apparatus |
| US6608308B1 (en) * | 1999-05-26 | 2003-08-19 | Nikon Corporation | Electrostatic lens systems for secondary-electron mapping-projection apparatus, and mapping-projection apparatus and methods comprising same |
| US6624426B2 (en) * | 2000-12-11 | 2003-09-23 | Schlumberger Technologies Inc. | Split magnetic lens for controlling a charged particle beam |
| US7078994B2 (en) * | 2003-02-18 | 2006-07-18 | Glenn Henry Martin | Constant power and temperature coil |
| GB2412232A (en) * | 2004-03-15 | 2005-09-21 | Ims Nanofabrication Gmbh | Particle-optical projection system |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2373328A (en) * | 1943-06-07 | 1945-04-10 | Adel Prec Products Corp | Wrap-around wire supporting clip |
| US2418349A (en) * | 1945-12-13 | 1947-04-01 | Rca Corp | Method of and means for correcting for distortion in electron lens systems |
| US2819403A (en) * | 1954-07-01 | 1958-01-07 | Rca Corp | Electron microscopy |
-
1971
- 1971-12-15 JP JP46100977A patent/JPS5213713B2/ja not_active Expired
-
1972
- 1972-12-15 US US00315455A patent/US3851172A/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55121540U (de) * | 1979-02-19 | 1980-08-28 | ||
| JPS5848823Y2 (ja) * | 1979-04-16 | 1983-11-08 | 東亜特殊電機株式会社 | 携帯用送信機 |
Also Published As
| Publication number | Publication date |
|---|---|
| DE2261497B2 (de) | 1976-09-23 |
| JPS4866364A (de) | 1973-09-11 |
| DE2261497A1 (de) | 1973-07-26 |
| US3851172A (en) | 1974-11-26 |