JPS52127350A - Fine body with its locating mark - Google Patents

Fine body with its locating mark

Info

Publication number
JPS52127350A
JPS52127350A JP4371576A JP4371576A JPS52127350A JP S52127350 A JPS52127350 A JP S52127350A JP 4371576 A JP4371576 A JP 4371576A JP 4371576 A JP4371576 A JP 4371576A JP S52127350 A JPS52127350 A JP S52127350A
Authority
JP
Japan
Prior art keywords
fine body
locating mark
fine
locating
mark
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4371576A
Other languages
Japanese (ja)
Inventor
Hideharu Egawa
Yoshiaki Arimura
Yasoji Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP4371576A priority Critical patent/JPS52127350A/en
Publication of JPS52127350A publication Critical patent/JPS52127350A/en
Priority to US05/932,400 priority patent/US4209830A/en
Pending legal-status Critical Current

Links

Landscapes

  • Image Analysis (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Image Processing (AREA)

Abstract

PURPOSE: To correctly detect the position of a fine body by attaching to the surface of the fine body, which has a pattern on its surface, a locating mark which has different directivity from the pattern of the fine body.
COPYRIGHT: (C)1977,JPO&Japio
JP4371576A 1976-04-19 1976-04-19 Fine body with its locating mark Pending JPS52127350A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP4371576A JPS52127350A (en) 1976-04-19 1976-04-19 Fine body with its locating mark
US05/932,400 US4209830A (en) 1976-04-19 1978-08-09 Fine object having position and direction sensing mark and a system for detecting the position and direction of the sensing mark

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4371576A JPS52127350A (en) 1976-04-19 1976-04-19 Fine body with its locating mark

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP51090176A Division JPS5840682B2 (en) 1976-04-19 1976-07-30 Position detection device and position detection method for marked objects

Publications (1)

Publication Number Publication Date
JPS52127350A true JPS52127350A (en) 1977-10-25

Family

ID=12671492

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4371576A Pending JPS52127350A (en) 1976-04-19 1976-04-19 Fine body with its locating mark

Country Status (1)

Country Link
JP (1) JPS52127350A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS494195A (en) * 1972-05-02 1974-01-14

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS494195A (en) * 1972-05-02 1974-01-14

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