JPS52123862A - Sample cooler of electron beam observation equipment - Google Patents
Sample cooler of electron beam observation equipmentInfo
- Publication number
- JPS52123862A JPS52123862A JP4038976A JP4038976A JPS52123862A JP S52123862 A JPS52123862 A JP S52123862A JP 4038976 A JP4038976 A JP 4038976A JP 4038976 A JP4038976 A JP 4038976A JP S52123862 A JPS52123862 A JP S52123862A
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- observation equipment
- beam observation
- sample cooler
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To compact the equipment, to improve the manipulation and to expectite the sample observation specially under the freezing condition by combining the sample fine adjustment with the cooling division in one body.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4038976A JPS52123862A (en) | 1976-04-12 | 1976-04-12 | Sample cooler of electron beam observation equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4038976A JPS52123862A (en) | 1976-04-12 | 1976-04-12 | Sample cooler of electron beam observation equipment |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52123862A true JPS52123862A (en) | 1977-10-18 |
Family
ID=12579289
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4038976A Pending JPS52123862A (en) | 1976-04-12 | 1976-04-12 | Sample cooler of electron beam observation equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52123862A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5470358U (en) * | 1977-10-28 | 1979-05-18 | ||
JPS6174946U (en) * | 1984-10-19 | 1986-05-21 | ||
JPH04294042A (en) * | 1990-12-20 | 1992-10-19 | Siemens Nixdorf Inf Syst Ag | Device cooler in vacuum chamber |
JP2007053048A (en) * | 2005-08-19 | 2007-03-01 | Sii Nanotechnology Inc | Processing device using focusing charged particle beam |
WO2014002700A1 (en) * | 2012-06-28 | 2014-01-03 | 株式会社日立ハイテクノロジーズ | Cryogenic specimen holder and cooling source container |
-
1976
- 1976-04-12 JP JP4038976A patent/JPS52123862A/en active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5470358U (en) * | 1977-10-28 | 1979-05-18 | ||
JPS6174946U (en) * | 1984-10-19 | 1986-05-21 | ||
JPH04294042A (en) * | 1990-12-20 | 1992-10-19 | Siemens Nixdorf Inf Syst Ag | Device cooler in vacuum chamber |
JP2007053048A (en) * | 2005-08-19 | 2007-03-01 | Sii Nanotechnology Inc | Processing device using focusing charged particle beam |
WO2014002700A1 (en) * | 2012-06-28 | 2014-01-03 | 株式会社日立ハイテクノロジーズ | Cryogenic specimen holder and cooling source container |
JP2014010965A (en) * | 2012-06-28 | 2014-01-20 | Hitachi High-Technologies Corp | Sample cooling holder and cooling source container |
US9543112B2 (en) | 2012-06-28 | 2017-01-10 | Hitachi High-Technologies Corporation | Specimen cryo holder and dewar |
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