JPS52123862A - Sample cooler of electron beam observation equipment - Google Patents

Sample cooler of electron beam observation equipment

Info

Publication number
JPS52123862A
JPS52123862A JP4038976A JP4038976A JPS52123862A JP S52123862 A JPS52123862 A JP S52123862A JP 4038976 A JP4038976 A JP 4038976A JP 4038976 A JP4038976 A JP 4038976A JP S52123862 A JPS52123862 A JP S52123862A
Authority
JP
Japan
Prior art keywords
electron beam
observation equipment
beam observation
sample cooler
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4038976A
Other languages
Japanese (ja)
Inventor
Moriki Kubozoe
Shinjiro Katagiri
Yoshihisa Namikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4038976A priority Critical patent/JPS52123862A/en
Publication of JPS52123862A publication Critical patent/JPS52123862A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To compact the equipment, to improve the manipulation and to expectite the sample observation specially under the freezing condition by combining the sample fine adjustment with the cooling division in one body.
COPYRIGHT: (C)1977,JPO&Japio
JP4038976A 1976-04-12 1976-04-12 Sample cooler of electron beam observation equipment Pending JPS52123862A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4038976A JPS52123862A (en) 1976-04-12 1976-04-12 Sample cooler of electron beam observation equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4038976A JPS52123862A (en) 1976-04-12 1976-04-12 Sample cooler of electron beam observation equipment

Publications (1)

Publication Number Publication Date
JPS52123862A true JPS52123862A (en) 1977-10-18

Family

ID=12579289

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4038976A Pending JPS52123862A (en) 1976-04-12 1976-04-12 Sample cooler of electron beam observation equipment

Country Status (1)

Country Link
JP (1) JPS52123862A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5470358U (en) * 1977-10-28 1979-05-18
JPS6174946U (en) * 1984-10-19 1986-05-21
JPH04294042A (en) * 1990-12-20 1992-10-19 Siemens Nixdorf Inf Syst Ag Device cooler in vacuum chamber
JP2007053048A (en) * 2005-08-19 2007-03-01 Sii Nanotechnology Inc Processing device using focusing charged particle beam
WO2014002700A1 (en) * 2012-06-28 2014-01-03 株式会社日立ハイテクノロジーズ Cryogenic specimen holder and cooling source container

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5470358U (en) * 1977-10-28 1979-05-18
JPS6174946U (en) * 1984-10-19 1986-05-21
JPH04294042A (en) * 1990-12-20 1992-10-19 Siemens Nixdorf Inf Syst Ag Device cooler in vacuum chamber
JP2007053048A (en) * 2005-08-19 2007-03-01 Sii Nanotechnology Inc Processing device using focusing charged particle beam
WO2014002700A1 (en) * 2012-06-28 2014-01-03 株式会社日立ハイテクノロジーズ Cryogenic specimen holder and cooling source container
JP2014010965A (en) * 2012-06-28 2014-01-20 Hitachi High-Technologies Corp Sample cooling holder and cooling source container
US9543112B2 (en) 2012-06-28 2017-01-10 Hitachi High-Technologies Corporation Specimen cryo holder and dewar

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