JPS52120763A - Silicon epitaxial growth method - Google Patents
Silicon epitaxial growth methodInfo
- Publication number
- JPS52120763A JPS52120763A JP3716876A JP3716876A JPS52120763A JP S52120763 A JPS52120763 A JP S52120763A JP 3716876 A JP3716876 A JP 3716876A JP 3716876 A JP3716876 A JP 3716876A JP S52120763 A JPS52120763 A JP S52120763A
- Authority
- JP
- Japan
- Prior art keywords
- epitaxial growth
- growth method
- silicon epitaxial
- growth
- density
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: To decrease the automatic doping in lateral direction by performing growth with low SiCl4 density only for a short time after start of epitaxial growth and then by shortening the high temperature holding time as much as possible by having continuous growth with high SiCl4 density.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3716876A JPS52120763A (en) | 1976-04-05 | 1976-04-05 | Silicon epitaxial growth method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3716876A JPS52120763A (en) | 1976-04-05 | 1976-04-05 | Silicon epitaxial growth method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52120763A true JPS52120763A (en) | 1977-10-11 |
Family
ID=12490060
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3716876A Pending JPS52120763A (en) | 1976-04-05 | 1976-04-05 | Silicon epitaxial growth method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52120763A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53146483U (en) * | 1977-04-16 | 1978-11-17 | ||
JPS62112319A (en) * | 1985-09-06 | 1987-05-23 | フィリップス エレクトロニクス ネムローゼ フェンノートシャップ | Manufacture of semiconductor device |
-
1976
- 1976-04-05 JP JP3716876A patent/JPS52120763A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53146483U (en) * | 1977-04-16 | 1978-11-17 | ||
JPS62112319A (en) * | 1985-09-06 | 1987-05-23 | フィリップス エレクトロニクス ネムローゼ フェンノートシャップ | Manufacture of semiconductor device |
JPH0736387B2 (en) * | 1985-09-06 | 1995-04-19 | エヌ・ベ−・フイリツプス・フル−イランペンフアブリケン | Semiconductor device manufacturing method |
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