JPS52117570A - Position detecting method - Google Patents
Position detecting methodInfo
- Publication number
- JPS52117570A JPS52117570A JP3417676A JP3417676A JPS52117570A JP S52117570 A JPS52117570 A JP S52117570A JP 3417676 A JP3417676 A JP 3417676A JP 3417676 A JP3417676 A JP 3417676A JP S52117570 A JPS52117570 A JP S52117570A
- Authority
- JP
- Japan
- Prior art keywords
- position detecting
- detecting method
- stage
- continuous
- correction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Electron Beam Exposure (AREA)
Abstract
PURPOSE: To perform position detection at early stage of electrostatic scanning giving continuous mark in the continuous shift direction of the stage and then to carry out drawing by beam blanking. Thus, the correction is performed for the drawing position.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51034176A JPS606088B2 (en) | 1976-03-30 | 1976-03-30 | Electron beam drawing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51034176A JPS606088B2 (en) | 1976-03-30 | 1976-03-30 | Electron beam drawing method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52117570A true JPS52117570A (en) | 1977-10-03 |
JPS606088B2 JPS606088B2 (en) | 1985-02-15 |
Family
ID=12406885
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP51034176A Expired JPS606088B2 (en) | 1976-03-30 | 1976-03-30 | Electron beam drawing method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS606088B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54118777A (en) * | 1978-03-08 | 1979-09-14 | Cho Lsi Gijutsu Kenkyu Kumiai | Method of exposing pattern |
-
1976
- 1976-03-30 JP JP51034176A patent/JPS606088B2/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54118777A (en) * | 1978-03-08 | 1979-09-14 | Cho Lsi Gijutsu Kenkyu Kumiai | Method of exposing pattern |
Also Published As
Publication number | Publication date |
---|---|
JPS606088B2 (en) | 1985-02-15 |
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