JPS5186975A - - Google Patents
Info
- Publication number
- JPS5186975A JPS5186975A JP50134752A JP13475275A JPS5186975A JP S5186975 A JPS5186975 A JP S5186975A JP 50134752 A JP50134752 A JP 50134752A JP 13475275 A JP13475275 A JP 13475275A JP S5186975 A JPS5186975 A JP S5186975A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70358—Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Projection-Type Copiers In General (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Variable Magnification In Projection-Type Copying Machines (AREA)
- Automatic Focus Adjustment (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19742460914 DE2460914C2 (de) | 1974-12-21 | 1974-12-21 | Photolithographische Projektionsvorrichtung |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5186975A true JPS5186975A (pt) | 1976-07-30 |
JPS548070B2 JPS548070B2 (pt) | 1979-04-12 |
Family
ID=5934300
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13475275A Expired JPS548070B2 (pt) | 1974-12-21 | 1975-11-11 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JPS548070B2 (pt) |
DE (1) | DE2460914C2 (pt) |
FR (1) | FR2295452A2 (pt) |
GB (1) | GB1510007A (pt) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08172048A (ja) * | 1995-06-16 | 1996-07-02 | Hitachi Ltd | 露光方法 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2633297A1 (de) * | 1976-07-23 | 1978-01-26 | Siemens Ag | Verfahren zur automatischen justierung |
DE2635275C2 (de) * | 1976-08-05 | 1984-09-06 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zur Justierung eines scheibenförmigen Substrates relativ zu einer Fotomaske in einem Röntgenstrahlbelichtungsgerät |
DE2757386C3 (de) * | 1977-12-22 | 1981-11-26 | Agfa-Gevaert Ag, 5090 Leverkusen | Belichtungsanordnung für Kopiergeräte |
FR2450470A1 (fr) * | 1979-02-27 | 1980-09-26 | Thomson Csf | Systeme optique de projection en photorepetition |
TWI237307B (en) | 2003-05-01 | 2005-08-01 | Nikon Corp | Optical projection system, light exposing apparatus and light exposing method |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2464793A (en) * | 1942-08-08 | 1949-03-22 | Lester Cooke Jr H | Method and apparatus for photographic scanning |
DE1173327B (de) * | 1961-04-10 | 1964-07-02 | Logetronics Inc | Anordnung zum Feststellen und automatischen Einstellen der Bildschaerfe in einem fotografischen Geraet |
DE2050590C2 (de) * | 1970-10-15 | 1982-06-16 | Ibm Deutschland Gmbh, 7000 Stuttgart | Projektionseinrichtung |
US3819265A (en) * | 1972-08-02 | 1974-06-25 | Bell Telephone Labor Inc | Scanning projection printer apparatus and method |
-
1974
- 1974-12-21 DE DE19742460914 patent/DE2460914C2/de not_active Expired
-
1975
- 1975-11-06 GB GB4598375A patent/GB1510007A/en not_active Expired
- 1975-11-07 FR FR7534729A patent/FR2295452A2/fr active Granted
- 1975-11-11 JP JP13475275A patent/JPS548070B2/ja not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08172048A (ja) * | 1995-06-16 | 1996-07-02 | Hitachi Ltd | 露光方法 |
JP2576814B2 (ja) * | 1995-06-16 | 1997-01-29 | 株式会社日立製作所 | 露光方法 |
Also Published As
Publication number | Publication date |
---|---|
GB1510007A (en) | 1978-05-10 |
FR2295452A2 (fr) | 1976-07-16 |
DE2460914A1 (de) | 1976-06-24 |
DE2460914C2 (de) | 1983-08-18 |
FR2295452B2 (pt) | 1977-12-16 |
JPS548070B2 (pt) | 1979-04-12 |