GB1510007A - Projection of images - Google Patents
Projection of imagesInfo
- Publication number
- GB1510007A GB1510007A GB4598375A GB4598375A GB1510007A GB 1510007 A GB1510007 A GB 1510007A GB 4598375 A GB4598375 A GB 4598375A GB 4598375 A GB4598375 A GB 4598375A GB 1510007 A GB1510007 A GB 1510007A
- Authority
- GB
- United Kingdom
- Prior art keywords
- plate
- support means
- master
- wafer
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70358—Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Projection-Type Copiers In General (AREA)
- Variable Magnification In Projection-Type Copying Machines (AREA)
- Automatic Focus Adjustment (AREA)
Abstract
1510007 Projection printing INTERNATIONAL BUSINESS MACHINES CORP 6 Nov 1975 [21 Dec 1974] 45983/75 Addition to 1315256 Heading G2A In the apparatus of the Parent Specification, wherein a support means holds in fixed relationship an image-bearing master plate and a photosensitive receiving plate and positioning means selectively moves the support means in X and Y directions with respect to an optical projection system for projecting a section of the master image on to the receiving plate, the support means holds the master plate (e.g. mask) and receiving plate (e.g. wafer) in back-to-back relationship. The support means is supported on a pair of spaced guide surfaces having a spacing many times greater than the distance between the outer surfaces of the master and receiving plates. As shown, a support means in the form of a carrier 80 which is transported with respect to an optical system by raster scanning means, not shown, carries holder plates 85 and 86 for the suction attachment of a mask 40 and wafer 50, respectively, and has air bearings 90 and 92 which are very widely spaced relative to the distance between the mask and wafer. Plate 86 is aligned with respect to plate 85 by three servo-motors, servomotor 82 only being shown. The optical system has a light source 21 and comprises semi-transparent mirrors 28, 35 and 36, an optical path 30 which has a hexagonal or rhombic light aperture 32 and which passes through an aperture in carrier 80, two microscope objectives 42 and 43 having automatic focusing means in the form of focus detectors 60 and 61 and servomotors 64 and 74, and an eyepiece 63.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19742460914 DE2460914C2 (en) | 1974-12-21 | 1974-12-21 | Photolithographic projection apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1510007A true GB1510007A (en) | 1978-05-10 |
Family
ID=5934300
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB4598375A Expired GB1510007A (en) | 1974-12-21 | 1975-11-06 | Projection of images |
Country Status (4)
Country | Link |
---|---|
JP (1) | JPS548070B2 (en) |
DE (1) | DE2460914C2 (en) |
FR (1) | FR2295452A2 (en) |
GB (1) | GB1510007A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7471374B2 (en) | 2003-05-01 | 2008-12-30 | Nikon Corporation | Projection optical system, exposure apparatus, and exposure method |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2633297A1 (en) * | 1976-07-23 | 1978-01-26 | Siemens Ag | AUTOMATIC ADJUSTMENT PROCEDURE |
DE2635275C2 (en) * | 1976-08-05 | 1984-09-06 | Siemens AG, 1000 Berlin und 8000 München | Method for adjusting a disk-shaped substrate relative to a photomask in an X-ray exposure apparatus |
DE2757386C3 (en) * | 1977-12-22 | 1981-11-26 | Agfa-Gevaert Ag, 5090 Leverkusen | Exposure arrangement for copiers |
FR2450470A1 (en) * | 1979-02-27 | 1980-09-26 | Thomson Csf | OPTICAL PROJECTION SYSTEM IN PHOTOREPETITION |
JP2576814B2 (en) * | 1995-06-16 | 1997-01-29 | 株式会社日立製作所 | Exposure method |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2464793A (en) * | 1942-08-08 | 1949-03-22 | Lester Cooke Jr H | Method and apparatus for photographic scanning |
DE1173327B (en) * | 1961-04-10 | 1964-07-02 | Logetronics Inc | Arrangement for detecting and automatically adjusting the focus in a photographic device |
DE2050590C2 (en) * | 1970-10-15 | 1982-06-16 | Ibm Deutschland Gmbh, 7000 Stuttgart | Projection device |
US3819265A (en) * | 1972-08-02 | 1974-06-25 | Bell Telephone Labor Inc | Scanning projection printer apparatus and method |
-
1974
- 1974-12-21 DE DE19742460914 patent/DE2460914C2/en not_active Expired
-
1975
- 1975-11-06 GB GB4598375A patent/GB1510007A/en not_active Expired
- 1975-11-07 FR FR7534729A patent/FR2295452A2/en active Granted
- 1975-11-11 JP JP13475275A patent/JPS548070B2/ja not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7471374B2 (en) | 2003-05-01 | 2008-12-30 | Nikon Corporation | Projection optical system, exposure apparatus, and exposure method |
Also Published As
Publication number | Publication date |
---|---|
FR2295452A2 (en) | 1976-07-16 |
JPS548070B2 (en) | 1979-04-12 |
DE2460914C2 (en) | 1983-08-18 |
JPS5186975A (en) | 1976-07-30 |
DE2460914A1 (en) | 1976-06-24 |
FR2295452B2 (en) | 1977-12-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed | ||
PCNP | Patent ceased through non-payment of renewal fee |