JPS5177352A - - Google Patents
Info
- Publication number
- JPS5177352A JPS5177352A JP50140353A JP14035375A JPS5177352A JP S5177352 A JPS5177352 A JP S5177352A JP 50140353 A JP50140353 A JP 50140353A JP 14035375 A JP14035375 A JP 14035375A JP S5177352 A JPS5177352 A JP S5177352A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
- G01D5/34715—Scale reading or illumination devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
- G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
- G01B11/007—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines feeler heads therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US05/526,778 US3957378A (en) | 1974-11-25 | 1974-11-25 | Two-axis moire fringe displacement transducer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5177352A true JPS5177352A (ja) | 1976-07-05 |
Family
ID=24098762
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50140353A Pending JPS5177352A (ja) | 1974-11-25 | 1975-11-25 | |
JP1984085614U Pending JPS6025912U (ja) | 1974-11-25 | 1984-06-11 | 変位変換器 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1984085614U Pending JPS6025912U (ja) | 1974-11-25 | 1984-06-11 | 変位変換器 |
Country Status (6)
Country | Link |
---|---|
US (1) | US3957378A (ja) |
JP (2) | JPS5177352A (ja) |
CA (1) | CA1028144A (ja) |
DE (1) | DE2550840C2 (ja) |
FR (1) | FR2292215A1 (ja) |
GB (1) | GB1513898A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60250201A (ja) * | 1984-05-25 | 1985-12-10 | Agency Of Ind Science & Technol | 投影像の二次元的な変位測定装置 |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4546347A (en) * | 1981-05-18 | 1985-10-08 | Mouse Systems Corporation | Detector for electro-optical mouse |
DE3234471C1 (de) * | 1982-09-17 | 1983-08-25 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Mehrkoordinaten-Tastkopf |
DE3234470C2 (de) * | 1982-09-17 | 1985-11-21 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Mehrkoordinaten-Tastkopf |
US4782327A (en) * | 1985-01-02 | 1988-11-01 | Victor B. Kley | Computer control |
US4984287A (en) * | 1988-11-15 | 1991-01-08 | Msc Technologies, Inc. | Method for orienting a dual mouse optical scanner |
US4942621A (en) * | 1988-11-15 | 1990-07-17 | Msc Technologies, Inc. | Method for mapping scanned pixel data |
EP0392085B1 (de) * | 1989-04-12 | 1992-04-15 | Landis & Gyr Betriebs AG | Anordnung zur Messung einer Spurabweichung einer bewegbaren Folienbahn |
US5390424A (en) * | 1990-01-25 | 1995-02-21 | Renishaw Metrology Limited | Analogue probe |
US5052807A (en) * | 1990-06-28 | 1991-10-01 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Three dimensional moire pattern alignment |
US5390423A (en) * | 1991-01-22 | 1995-02-21 | Renishaw Plc | Analogue probe |
DE4105433C2 (de) * | 1991-02-21 | 1994-05-19 | Heidenhain Gmbh Dr Johannes | Einrichtung zur Konturformprüfung an einer Bearbeitungs- oder Meßmaschine |
US5204524A (en) * | 1991-03-22 | 1993-04-20 | Mitutoyo Corporation | Two-dimensional optical encoder with three gratings in each dimension |
US6660997B2 (en) * | 2001-04-26 | 2003-12-09 | Creo Srl | Absolute position Moiré type encoder for use in a control system |
US7256871B2 (en) * | 2004-07-27 | 2007-08-14 | Asml Netherlands B.V. | Lithographic apparatus and method for calibrating the same |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1220152B (de) * | 1963-08-23 | 1966-06-30 | Wenczler & Heidenhain | Vorrichtung zum verkantungsfehlerfreien Messen von Laengen |
US3330964A (en) * | 1963-09-09 | 1967-07-11 | Itck Corp | Photoelectric coordinate measuring system |
US3578979A (en) * | 1968-04-23 | 1971-05-18 | Tajima Seisakusho Kk | Electrical signal generating apparatus having a scale grid |
DE2003492A1 (de) * | 1970-01-27 | 1971-08-12 | Leitz Ernst Gmbh | Messverfahren fuer Schrittgeber zum Messen von Laengen oder Winkeln sowie Anordnungen zur Durchfuehrung dieses Messverfahrens |
GB1383744A (en) * | 1971-06-01 | 1974-02-12 | Ferranti Ltd | Indicating devices |
US3768911A (en) * | 1971-08-17 | 1973-10-30 | Keuffel & Esser Co | Electro-optical incremental motion and position indicator |
US3806254A (en) * | 1971-12-08 | 1974-04-23 | Information Storage Systems | Agc servo system having error signal responsive to a non-extinguishable intensity light energy signal |
US3867038A (en) * | 1972-11-27 | 1975-02-18 | Baird Atomic Inc | Optical alignment system |
GB1443220A (en) * | 1972-12-19 | 1976-07-21 | Leitz Ernst Gmbh | Photo-electric incremental transducer |
-
1974
- 1974-11-25 US US05/526,778 patent/US3957378A/en not_active Expired - Lifetime
-
1975
- 1975-09-18 CA CA235,764A patent/CA1028144A/en not_active Expired
- 1975-10-27 GB GB44171/75A patent/GB1513898A/en not_active Expired
- 1975-11-12 DE DE2550840A patent/DE2550840C2/de not_active Expired
- 1975-11-25 FR FR7535905A patent/FR2292215A1/fr active Granted
- 1975-11-25 JP JP50140353A patent/JPS5177352A/ja active Pending
-
1984
- 1984-06-11 JP JP1984085614U patent/JPS6025912U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60250201A (ja) * | 1984-05-25 | 1985-12-10 | Agency Of Ind Science & Technol | 投影像の二次元的な変位測定装置 |
Also Published As
Publication number | Publication date |
---|---|
CA1028144A (en) | 1978-03-21 |
US3957378A (en) | 1976-05-18 |
FR2292215B1 (ja) | 1978-05-12 |
DE2550840A1 (de) | 1976-05-26 |
JPS6025912U (ja) | 1985-02-21 |
GB1513898A (en) | 1978-06-14 |
DE2550840C2 (de) | 1984-07-26 |
FR2292215A1 (fr) | 1976-06-18 |