JPS51147963A - Method of manufacturing a semiconductor device - Google Patents
Method of manufacturing a semiconductor deviceInfo
- Publication number
- JPS51147963A JPS51147963A JP7145875A JP7145875A JPS51147963A JP S51147963 A JPS51147963 A JP S51147963A JP 7145875 A JP7145875 A JP 7145875A JP 7145875 A JP7145875 A JP 7145875A JP S51147963 A JPS51147963 A JP S51147963A
- Authority
- JP
- Japan
- Prior art keywords
- manufacturing
- semiconductor device
- aluminum foil
- under
- aluminum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Weting (AREA)
Abstract
PURPOSE: A process for selectively etching an aluminum foil wherein no short circuits between wirings and no under cuts in the aluminum foil under a photoresist film are resulted when a fine pattern is applied to the aluminum thin film coated on a semiconductor substrate.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50071458A JPS5818777B2 (en) | 1975-06-14 | 1975-06-14 | Handout Taisouchino Seizouhouhou |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50071458A JPS5818777B2 (en) | 1975-06-14 | 1975-06-14 | Handout Taisouchino Seizouhouhou |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS51147963A true JPS51147963A (en) | 1976-12-18 |
JPS5818777B2 JPS5818777B2 (en) | 1983-04-14 |
Family
ID=13461143
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50071458A Expired JPS5818777B2 (en) | 1975-06-14 | 1975-06-14 | Handout Taisouchino Seizouhouhou |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5818777B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54110330U (en) * | 1978-01-19 | 1979-08-03 |
-
1975
- 1975-06-14 JP JP50071458A patent/JPS5818777B2/en not_active Expired
Non-Patent Citations (1)
Title |
---|
IBM TECHNICAL DISCLOSURE BULLETIN=1971 * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54110330U (en) * | 1978-01-19 | 1979-08-03 |
Also Published As
Publication number | Publication date |
---|---|
JPS5818777B2 (en) | 1983-04-14 |
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