JPS51137418A - Photosensitive sulfur developing method - Google Patents

Photosensitive sulfur developing method

Info

Publication number
JPS51137418A
JPS51137418A JP6217775A JP6217775A JPS51137418A JP S51137418 A JPS51137418 A JP S51137418A JP 6217775 A JP6217775 A JP 6217775A JP 6217775 A JP6217775 A JP 6217775A JP S51137418 A JPS51137418 A JP S51137418A
Authority
JP
Japan
Prior art keywords
sulfur
photosensitive
developing method
exposed
photosenstive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6217775A
Other languages
Japanese (ja)
Inventor
Seisaku Oki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ONO GIJIYUTSU KENKIYUUSHIYO YU
ONO GIJUTSU KENKYUSHO KK
OONO GIJIYUTSU KENKIYUUSHIYO YUUGEN
Original Assignee
ONO GIJIYUTSU KENKIYUUSHIYO YU
ONO GIJUTSU KENKYUSHO KK
OONO GIJIYUTSU KENKIYUUSHIYO YUUGEN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ONO GIJIYUTSU KENKIYUUSHIYO YU, ONO GIJUTSU KENKYUSHO KK, OONO GIJIYUTSU KENKIYUUSHIYO YUUGEN filed Critical ONO GIJIYUTSU KENKIYUUSHIYO YU
Priority to JP6217775A priority Critical patent/JPS51137418A/en
Publication of JPS51137418A publication Critical patent/JPS51137418A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/0042Photosensitive materials with inorganic or organometallic light-sensitive compounds not otherwise provided for, e.g. inorganic resists
    • G03F7/0043Chalcogenides; Silicon, germanium, arsenic or derivatives thereof; Metals, oxides or alloys thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Metallurgy (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)

Abstract

PURPOSE:To obtain a high-sensitivity and soil-free image with a relatively simple operation without causing environmental pollution by making use of difference in lyophilicity between the exposed and non-exposed portions of photosenstive sulfur in development.
JP6217775A 1975-05-24 1975-05-24 Photosensitive sulfur developing method Pending JPS51137418A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6217775A JPS51137418A (en) 1975-05-24 1975-05-24 Photosensitive sulfur developing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6217775A JPS51137418A (en) 1975-05-24 1975-05-24 Photosensitive sulfur developing method

Publications (1)

Publication Number Publication Date
JPS51137418A true JPS51137418A (en) 1976-11-27

Family

ID=13192569

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6217775A Pending JPS51137418A (en) 1975-05-24 1975-05-24 Photosensitive sulfur developing method

Country Status (1)

Country Link
JP (1) JPS51137418A (en)

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