JPS51113572A - Centering method for electronic ray picture and the unit using the sai d method - Google Patents
Centering method for electronic ray picture and the unit using the sai d methodInfo
- Publication number
- JPS51113572A JPS51113572A JP3798475A JP3798475A JPS51113572A JP S51113572 A JPS51113572 A JP S51113572A JP 3798475 A JP3798475 A JP 3798475A JP 3798475 A JP3798475 A JP 3798475A JP S51113572 A JPS51113572 A JP S51113572A
- Authority
- JP
- Japan
- Prior art keywords
- sai
- unit
- ray picture
- centering
- electronic ray
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Control Of Position Or Direction (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Electron Beam Exposure (AREA)
Abstract
PURPOSE: Quick and easy centering means.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3798475A JPS51113572A (en) | 1975-03-31 | 1975-03-31 | Centering method for electronic ray picture and the unit using the sai d method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3798475A JPS51113572A (en) | 1975-03-31 | 1975-03-31 | Centering method for electronic ray picture and the unit using the sai d method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51113572A true JPS51113572A (en) | 1976-10-06 |
Family
ID=12512818
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3798475A Pending JPS51113572A (en) | 1975-03-31 | 1975-03-31 | Centering method for electronic ray picture and the unit using the sai d method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51113572A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5412676A (en) * | 1977-06-30 | 1979-01-30 | Fujitsu Ltd | Position matching method for electron beam exposure |
JPS5560949A (en) * | 1978-10-31 | 1980-05-08 | Nippon Telegr & Teleph Corp <Ntt> | Positioning mark for radiation working |
JPS5662322A (en) * | 1979-10-26 | 1981-05-28 | Fujitsu Ltd | Electronic beam exposure method |
JPS61174716A (en) * | 1985-01-30 | 1986-08-06 | Fujitsu Ltd | Electron beam exposure |
-
1975
- 1975-03-31 JP JP3798475A patent/JPS51113572A/en active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5412676A (en) * | 1977-06-30 | 1979-01-30 | Fujitsu Ltd | Position matching method for electron beam exposure |
JPS6145858B2 (en) * | 1977-06-30 | 1986-10-09 | Fujitsu Ltd | |
JPS5560949A (en) * | 1978-10-31 | 1980-05-08 | Nippon Telegr & Teleph Corp <Ntt> | Positioning mark for radiation working |
JPS5760623B2 (en) * | 1978-10-31 | 1982-12-20 | Nippon Telegraph & Telephone | |
JPS5662322A (en) * | 1979-10-26 | 1981-05-28 | Fujitsu Ltd | Electronic beam exposure method |
JPS6335095B2 (en) * | 1979-10-26 | 1988-07-13 | Fujitsu Ltd | |
JPS61174716A (en) * | 1985-01-30 | 1986-08-06 | Fujitsu Ltd | Electron beam exposure |
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