JPS51113572A - Centering method for electronic ray picture and the unit using the sai d method - Google Patents

Centering method for electronic ray picture and the unit using the sai d method

Info

Publication number
JPS51113572A
JPS51113572A JP3798475A JP3798475A JPS51113572A JP S51113572 A JPS51113572 A JP S51113572A JP 3798475 A JP3798475 A JP 3798475A JP 3798475 A JP3798475 A JP 3798475A JP S51113572 A JPS51113572 A JP S51113572A
Authority
JP
Japan
Prior art keywords
sai
unit
ray picture
centering
electronic ray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3798475A
Other languages
Japanese (ja)
Inventor
Genya Matsuoka
Isamu Oda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3798475A priority Critical patent/JPS51113572A/en
Publication of JPS51113572A publication Critical patent/JPS51113572A/en
Pending legal-status Critical Current

Links

Landscapes

  • Control Of Position Or Direction (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Electron Beam Exposure (AREA)

Abstract

PURPOSE: Quick and easy centering means.
COPYRIGHT: (C)1976,JPO&Japio
JP3798475A 1975-03-31 1975-03-31 Centering method for electronic ray picture and the unit using the sai d method Pending JPS51113572A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3798475A JPS51113572A (en) 1975-03-31 1975-03-31 Centering method for electronic ray picture and the unit using the sai d method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3798475A JPS51113572A (en) 1975-03-31 1975-03-31 Centering method for electronic ray picture and the unit using the sai d method

Publications (1)

Publication Number Publication Date
JPS51113572A true JPS51113572A (en) 1976-10-06

Family

ID=12512818

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3798475A Pending JPS51113572A (en) 1975-03-31 1975-03-31 Centering method for electronic ray picture and the unit using the sai d method

Country Status (1)

Country Link
JP (1) JPS51113572A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5412676A (en) * 1977-06-30 1979-01-30 Fujitsu Ltd Position matching method for electron beam exposure
JPS5560949A (en) * 1978-10-31 1980-05-08 Nippon Telegr & Teleph Corp <Ntt> Positioning mark for radiation working
JPS5662322A (en) * 1979-10-26 1981-05-28 Fujitsu Ltd Electronic beam exposure method
JPS61174716A (en) * 1985-01-30 1986-08-06 Fujitsu Ltd Electron beam exposure

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5412676A (en) * 1977-06-30 1979-01-30 Fujitsu Ltd Position matching method for electron beam exposure
JPS6145858B2 (en) * 1977-06-30 1986-10-09 Fujitsu Ltd
JPS5560949A (en) * 1978-10-31 1980-05-08 Nippon Telegr & Teleph Corp <Ntt> Positioning mark for radiation working
JPS5760623B2 (en) * 1978-10-31 1982-12-20 Nippon Telegraph & Telephone
JPS5662322A (en) * 1979-10-26 1981-05-28 Fujitsu Ltd Electronic beam exposure method
JPS6335095B2 (en) * 1979-10-26 1988-07-13 Fujitsu Ltd
JPS61174716A (en) * 1985-01-30 1986-08-06 Fujitsu Ltd Electron beam exposure

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