JPS5064185A - - Google Patents

Info

Publication number
JPS5064185A
JPS5064185A JP9984174A JP9984174A JPS5064185A JP S5064185 A JPS5064185 A JP S5064185A JP 9984174 A JP9984174 A JP 9984174A JP 9984174 A JP9984174 A JP 9984174A JP S5064185 A JPS5064185 A JP S5064185A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9984174A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5064185A publication Critical patent/JPS5064185A/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Nozzles (AREA)
  • Electrostatic Spraying Apparatus (AREA)
  • Details Or Accessories Of Spraying Plant Or Apparatus (AREA)
JP9984174A 1973-08-31 1974-08-30 Pending JPS5064185A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB4115373A GB1435344A (en) 1973-08-31 1973-08-31 Sputtering apparatus

Publications (1)

Publication Number Publication Date
JPS5064185A true JPS5064185A (ja) 1975-05-31

Family

ID=10418348

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9984174A Pending JPS5064185A (ja) 1973-08-31 1974-08-30

Country Status (4)

Country Link
JP (1) JPS5064185A (ja)
DE (1) DE2441448A1 (ja)
GB (1) GB1435344A (ja)
NL (1) NL7411499A (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5528530A (en) * 1978-08-17 1980-02-29 Matsushita Electric Ind Co Ltd Optical information recording method
DE3401700C1 (de) * 1984-01-19 1985-08-14 MTU Motoren- und Turbinen-Union München GmbH, 8000 München Verfahren zur Herstellung von Pulvern unter Weltraumbedingungen
JP2909744B2 (ja) * 1988-06-09 1999-06-23 日新製鋼株式会社 微粉末を被覆する方法と装置
DE19617155B4 (de) * 1995-06-28 2007-07-26 Oc Oerlikon Balzers Ag Sputterbeschichtungsstation, Verfahren zur Herstellung sputterbeschichteter Werkstücke und Verwendung der Station oder des Verfahrens zur Beschichtung scheibenförmiger Substrate

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4926184A (ja) * 1971-09-07 1974-03-08

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4926184A (ja) * 1971-09-07 1974-03-08

Also Published As

Publication number Publication date
NL7411499A (nl) 1975-03-04
DE2441448A1 (de) 1975-03-06
GB1435344A (en) 1976-05-12

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