JPS5064185A - - Google Patents
Info
- Publication number
- JPS5064185A JPS5064185A JP9984174A JP9984174A JPS5064185A JP S5064185 A JPS5064185 A JP S5064185A JP 9984174 A JP9984174 A JP 9984174A JP 9984174 A JP9984174 A JP 9984174A JP S5064185 A JPS5064185 A JP S5064185A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Nozzles (AREA)
- Electrostatic Spraying Apparatus (AREA)
- Details Or Accessories Of Spraying Plant Or Apparatus (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB4115373A GB1435344A (en) | 1973-08-31 | 1973-08-31 | Sputtering apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5064185A true JPS5064185A (ja) | 1975-05-31 |
Family
ID=10418348
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9984174A Pending JPS5064185A (ja) | 1973-08-31 | 1974-08-30 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JPS5064185A (ja) |
DE (1) | DE2441448A1 (ja) |
GB (1) | GB1435344A (ja) |
NL (1) | NL7411499A (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5528530A (en) * | 1978-08-17 | 1980-02-29 | Matsushita Electric Ind Co Ltd | Optical information recording method |
DE3401700C1 (de) * | 1984-01-19 | 1985-08-14 | MTU Motoren- und Turbinen-Union München GmbH, 8000 München | Verfahren zur Herstellung von Pulvern unter Weltraumbedingungen |
JP2909744B2 (ja) * | 1988-06-09 | 1999-06-23 | 日新製鋼株式会社 | 微粉末を被覆する方法と装置 |
DE19617155B4 (de) * | 1995-06-28 | 2007-07-26 | Oc Oerlikon Balzers Ag | Sputterbeschichtungsstation, Verfahren zur Herstellung sputterbeschichteter Werkstücke und Verwendung der Station oder des Verfahrens zur Beschichtung scheibenförmiger Substrate |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4926184A (ja) * | 1971-09-07 | 1974-03-08 |
-
1973
- 1973-08-31 GB GB4115373A patent/GB1435344A/en not_active Expired
-
1974
- 1974-08-29 DE DE19742441448 patent/DE2441448A1/de active Pending
- 1974-08-29 NL NL7411499A patent/NL7411499A/xx unknown
- 1974-08-30 JP JP9984174A patent/JPS5064185A/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4926184A (ja) * | 1971-09-07 | 1974-03-08 |
Also Published As
Publication number | Publication date |
---|---|
NL7411499A (nl) | 1975-03-04 |
DE2441448A1 (de) | 1975-03-06 |
GB1435344A (en) | 1976-05-12 |