JPS50143463A - - Google Patents
Info
- Publication number
- JPS50143463A JPS50143463A JP5030074A JP5030074A JPS50143463A JP S50143463 A JPS50143463 A JP S50143463A JP 5030074 A JP5030074 A JP 5030074A JP 5030074 A JP5030074 A JP 5030074A JP S50143463 A JPS50143463 A JP S50143463A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5030074A JPS5346593B2 (de) | 1974-05-08 | 1974-05-08 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5030074A JPS5346593B2 (de) | 1974-05-08 | 1974-05-08 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS50143463A true JPS50143463A (de) | 1975-11-18 |
JPS5346593B2 JPS5346593B2 (de) | 1978-12-14 |
Family
ID=12855028
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5030074A Expired JPS5346593B2 (de) | 1974-05-08 | 1974-05-08 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5346593B2 (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS554906A (en) * | 1978-06-26 | 1980-01-14 | Hitachi Ltd | Semi-conductor manufacturing method |
JPH04165616A (ja) * | 1990-10-30 | 1992-06-11 | Nec Corp | 拡散層の形成方法 |
-
1974
- 1974-05-08 JP JP5030074A patent/JPS5346593B2/ja not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS554906A (en) * | 1978-06-26 | 1980-01-14 | Hitachi Ltd | Semi-conductor manufacturing method |
JPH04165616A (ja) * | 1990-10-30 | 1992-06-11 | Nec Corp | 拡散層の形成方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS5346593B2 (de) | 1978-12-14 |