JPS5013971A - - Google Patents
Info
- Publication number
- JPS5013971A JPS5013971A JP48064470A JP6447073A JPS5013971A JP S5013971 A JPS5013971 A JP S5013971A JP 48064470 A JP48064470 A JP 48064470A JP 6447073 A JP6447073 A JP 6447073A JP S5013971 A JPS5013971 A JP S5013971A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Separation Of Gases By Adsorption (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6447073A JPS532152B2 (fr) | 1973-06-08 | 1973-06-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6447073A JPS532152B2 (fr) | 1973-06-08 | 1973-06-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5013971A true JPS5013971A (fr) | 1975-02-13 |
| JPS532152B2 JPS532152B2 (fr) | 1978-01-25 |
Family
ID=13259134
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6447073A Expired JPS532152B2 (fr) | 1973-06-08 | 1973-06-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS532152B2 (fr) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5413047A (en) * | 1977-06-29 | 1979-01-31 | Mcquay Perfex Inc | Beverage cooling tank |
| JPS54121446A (en) * | 1978-03-08 | 1979-09-20 | Mcquay Perfex Inc | Drink cooling tank |
| JP2008194626A (ja) * | 2007-02-14 | 2008-08-28 | Nichias Corp | 浄化気体供給装置 |
| WO2011125973A1 (fr) * | 2010-04-05 | 2011-10-13 | 株式会社ニコン | Support de filtre, dispositif d'exposition, et procédé de production de dispositif |
| WO2011125975A1 (fr) * | 2010-04-05 | 2011-10-13 | 株式会社ニコン | Boîte de filtre, dispositif d'exposition, et procédé de production de dispositif |
| WO2011125974A1 (fr) * | 2010-04-05 | 2011-10-13 | 株式会社ニコン | Appareil de filtre, procédé de logement de filtre, et dispositif d'exposition |
| US8890639B2 (en) | 2011-12-20 | 2014-11-18 | Lsis Co., Ltd. | Auxiliary contact mechanism for magnetic contactor |
-
1973
- 1973-06-08 JP JP6447073A patent/JPS532152B2/ja not_active Expired
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5413047A (en) * | 1977-06-29 | 1979-01-31 | Mcquay Perfex Inc | Beverage cooling tank |
| JPS54121446A (en) * | 1978-03-08 | 1979-09-20 | Mcquay Perfex Inc | Drink cooling tank |
| JP2008194626A (ja) * | 2007-02-14 | 2008-08-28 | Nichias Corp | 浄化気体供給装置 |
| WO2011125973A1 (fr) * | 2010-04-05 | 2011-10-13 | 株式会社ニコン | Support de filtre, dispositif d'exposition, et procédé de production de dispositif |
| WO2011125975A1 (fr) * | 2010-04-05 | 2011-10-13 | 株式会社ニコン | Boîte de filtre, dispositif d'exposition, et procédé de production de dispositif |
| WO2011125974A1 (fr) * | 2010-04-05 | 2011-10-13 | 株式会社ニコン | Appareil de filtre, procédé de logement de filtre, et dispositif d'exposition |
| CN102821828A (zh) * | 2010-04-05 | 2012-12-12 | 株式会社尼康 | 过滤器保持装置、曝光装置、及元件制造方法 |
| CN102821829A (zh) * | 2010-04-05 | 2012-12-12 | 株式会社尼康 | 过滤器箱、曝光装置、及元件制造方法 |
| CN102844093A (zh) * | 2010-04-05 | 2012-12-26 | 株式会社尼康 | 过滤器装置、过滤器的收容方法、及曝光装置 |
| US8890639B2 (en) | 2011-12-20 | 2014-11-18 | Lsis Co., Ltd. | Auxiliary contact mechanism for magnetic contactor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS532152B2 (fr) | 1978-01-25 |