JPS5012971A - - Google Patents
Info
- Publication number
- JPS5012971A JPS5012971A JP6281173A JP6281173A JPS5012971A JP S5012971 A JPS5012971 A JP S5012971A JP 6281173 A JP6281173 A JP 6281173A JP 6281173 A JP6281173 A JP 6281173A JP S5012971 A JPS5012971 A JP S5012971A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6281173A JPS5012971A (ja) | 1973-06-04 | 1973-06-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6281173A JPS5012971A (ja) | 1973-06-04 | 1973-06-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5012971A true JPS5012971A (ja) | 1975-02-10 |
Family
ID=13211083
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6281173A Pending JPS5012971A (ja) | 1973-06-04 | 1973-06-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5012971A (ja) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5522140U (ja) * | 1978-07-28 | 1980-02-13 | ||
| JPS5745932A (en) * | 1980-09-03 | 1982-03-16 | Hitachi Ltd | Heat treating device for wafer |
| JPS5787528U (ja) * | 1980-11-18 | 1982-05-29 | ||
| JPS57188341U (ja) * | 1981-05-25 | 1982-11-30 | ||
| EP0079121A2 (en) * | 1981-11-07 | 1983-05-18 | E.I. Du Pont De Nemours And Company | Apparatus and method for conveying flat members through a processing unit |
| JPS5932123A (ja) * | 1982-08-18 | 1984-02-21 | Sony Corp | 気相成長法 |
| JPS5950095A (ja) * | 1982-09-10 | 1984-03-22 | ジェミニ リサーチ， インコーポレイテッド | 化学反応器 |
| JPS5996829U (ja) * | 1982-12-21 | 1984-06-30 | 日本電気株式会社 | 半導体ウエ−ハの発熱担体 |
| US5242501A (en) * | 1982-09-10 | 1993-09-07 | Lam Research Corporation | Susceptor in chemical vapor deposition reactors |
| JP2000269150A (ja) * | 1999-03-19 | 2000-09-29 | Toshiba Ceramics Co Ltd | 半導体ウエハ加熱処理用治具及びこれを用いた半導体ウエハ加熱処理用装置 |
| JP2010245396A (ja) * | 2009-04-08 | 2010-10-28 | Sumco Corp | Ｓｏｉウェーハの製造方法及び貼り合わせ装置 |
-
1973
- 1973-06-04 JP JP6281173A patent/JPS5012971A/ja active Pending
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5742174Y2 (ja) * | 1978-07-28 | 1982-09-17 | ||
| JPS5522140U (ja) * | 1978-07-28 | 1980-02-13 | ||
| JPS5745932A (en) * | 1980-09-03 | 1982-03-16 | Hitachi Ltd | Heat treating device for wafer |
| JPS5787528U (ja) * | 1980-11-18 | 1982-05-29 | ||
| JPS57188341U (ja) * | 1981-05-25 | 1982-11-30 | ||
| EP0079121A3 (en) * | 1981-11-07 | 1984-05-16 | E.I. Du Pont De Nemours And Company | Apparatus and method for conveying flat members through a processing unit |
| EP0079121A2 (en) * | 1981-11-07 | 1983-05-18 | E.I. Du Pont De Nemours And Company | Apparatus and method for conveying flat members through a processing unit |
| JPS5932123A (ja) * | 1982-08-18 | 1984-02-21 | Sony Corp | 気相成長法 |
| JPS5950095A (ja) * | 1982-09-10 | 1984-03-22 | ジェミニ リサーチ， インコーポレイテッド | 化学反応器 |
| US5242501A (en) * | 1982-09-10 | 1993-09-07 | Lam Research Corporation | Susceptor in chemical vapor deposition reactors |
| JPS5996829U (ja) * | 1982-12-21 | 1984-06-30 | 日本電気株式会社 | 半導体ウエ−ハの発熱担体 |
| JP2000269150A (ja) * | 1999-03-19 | 2000-09-29 | Toshiba Ceramics Co Ltd | 半導体ウエハ加熱処理用治具及びこれを用いた半導体ウエハ加熱処理用装置 |
| JP2010245396A (ja) * | 2009-04-08 | 2010-10-28 | Sumco Corp | Ｓｏｉウェーハの製造方法及び貼り合わせ装置 |