Classifications

• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
  • H01J37/02—Details
  • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
  • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
  • H01J37/1471—Arrangements for directing or deflecting the discharge along a desired path for centering, aligning or positioning of ray or beam
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
  • H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
  • H01J29/70—Arrangements for deflecting ray or beam
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
  • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
  • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
  • H01J37/3045—Object or beam position registration
• • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
  • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
  • Y10S505/00—Superconductor technology: apparatus, material, process
  • Y10S505/825—Apparatus per se, device per se, or process of making or operating same
  • Y10S505/872—Magnetic field shield

Landscapes

• Chemical & Material Sciences (AREA)
• Analytical Chemistry (AREA)
• Electron Beam Exposure (AREA)
• Particle Accelerators (AREA)
• Welding Or Cutting Using Electron Beams (AREA)

Applications Claiming Priority (1)

Publications (2)

Family

ID=9097484

Family Applications (1)

Country Status (5)

Cited By (1)

Families Citing this family (11)

Family Cites Families (4)

• 1972
  • 1972-04-25 FR FR727214639A patent/FR2181467B1/fr not_active Expired
• 1973
  • 1973-04-13 US US350719A patent/US3864597A/en not_active Expired - Lifetime
  • 1973-04-24 GB GB1944873A patent/GB1396209A/en not_active Expired
  • 1973-04-25 JP JP48046324A patent/JPS5218958B2/ja not_active Expired
  • 1973-04-25 DE DE2320888A patent/DE2320888C3/de not_active Expired

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