JPS4948278A - - Google Patents
Info
- Publication number
- JPS4948278A JPS4948278A JP8628972A JP8628972A JPS4948278A JP S4948278 A JPS4948278 A JP S4948278A JP 8628972 A JP8628972 A JP 8628972A JP 8628972 A JP8628972 A JP 8628972A JP S4948278 A JPS4948278 A JP S4948278A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8628972A JPS4948278A (ja) | 1972-08-30 | 1972-08-30 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8628972A JPS4948278A (ja) | 1972-08-30 | 1972-08-30 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS4948278A true JPS4948278A (ja) | 1974-05-10 |
Family
ID=13882663
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8628972A Pending JPS4948278A (ja) | 1972-08-30 | 1972-08-30 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS4948278A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57172748A (en) * | 1981-04-17 | 1982-10-23 | Oki Electric Ind Co Ltd | Manufacture of semiconductor device |
JPS57173956A (en) * | 1981-04-21 | 1982-10-26 | Oki Electric Ind Co Ltd | Manufacture of semiconductor device |
JPS63128626A (ja) * | 1986-11-18 | 1988-06-01 | Nec Corp | 半導体集積回路装置のコンタクト形成方法 |
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1972
- 1972-08-30 JP JP8628972A patent/JPS4948278A/ja active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57172748A (en) * | 1981-04-17 | 1982-10-23 | Oki Electric Ind Co Ltd | Manufacture of semiconductor device |
JPS57173956A (en) * | 1981-04-21 | 1982-10-26 | Oki Electric Ind Co Ltd | Manufacture of semiconductor device |
JPS63128626A (ja) * | 1986-11-18 | 1988-06-01 | Nec Corp | 半導体集積回路装置のコンタクト形成方法 |