JPS4948278A - - Google Patents

Info

Publication number
JPS4948278A
JPS4948278A JP8628972A JP8628972A JPS4948278A JP S4948278 A JPS4948278 A JP S4948278A JP 8628972 A JP8628972 A JP 8628972A JP 8628972 A JP8628972 A JP 8628972A JP S4948278 A JPS4948278 A JP S4948278A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8628972A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8628972A priority Critical patent/JPS4948278A/ja
Publication of JPS4948278A publication Critical patent/JPS4948278A/ja
Pending legal-status Critical Current

Links

JP8628972A 1972-08-30 1972-08-30 Pending JPS4948278A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8628972A JPS4948278A (ja) 1972-08-30 1972-08-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8628972A JPS4948278A (ja) 1972-08-30 1972-08-30

Publications (1)

Publication Number Publication Date
JPS4948278A true JPS4948278A (ja) 1974-05-10

Family

ID=13882663

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8628972A Pending JPS4948278A (ja) 1972-08-30 1972-08-30

Country Status (1)

Country Link
JP (1) JPS4948278A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57172748A (en) * 1981-04-17 1982-10-23 Oki Electric Ind Co Ltd Manufacture of semiconductor device
JPS57173956A (en) * 1981-04-21 1982-10-26 Oki Electric Ind Co Ltd Manufacture of semiconductor device
JPS63128626A (ja) * 1986-11-18 1988-06-01 Nec Corp 半導体集積回路装置のコンタクト形成方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57172748A (en) * 1981-04-17 1982-10-23 Oki Electric Ind Co Ltd Manufacture of semiconductor device
JPS57173956A (en) * 1981-04-21 1982-10-26 Oki Electric Ind Co Ltd Manufacture of semiconductor device
JPS63128626A (ja) * 1986-11-18 1988-06-01 Nec Corp 半導体集積回路装置のコンタクト形成方法

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