JPS4928362A - - Google Patents
Info
- Publication number
- JPS4928362A JPS4928362A JP47067399A JP6739972A JPS4928362A JP S4928362 A JPS4928362 A JP S4928362A JP 47067399 A JP47067399 A JP 47067399A JP 6739972 A JP6739972 A JP 6739972A JP S4928362 A JPS4928362 A JP S4928362A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7065—Production of alignment light, e.g. light source, control of coherence, polarization, pulse length, wavelength
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47067399A JPS4928362A (en) | 1972-07-05 | 1972-07-05 | |
| US00366576A US3853398A (en) | 1972-07-05 | 1973-06-04 | Mask pattern printing device |
| GB3199173A GB1432865A (en) | 1972-07-05 | 1973-07-05 | Mask printing devices |
| DE2334325A DE2334325C3 (en) | 1972-07-05 | 1973-07-05 | Lighting and viewing device of a device for copying a mask pattern |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47067399A JPS4928362A (en) | 1972-07-05 | 1972-07-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4928362A true JPS4928362A (en) | 1974-03-13 |
Family
ID=13343829
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47067399A Pending JPS4928362A (en) | 1972-07-05 | 1972-07-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4928362A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5493974A (en) * | 1978-01-06 | 1979-07-25 | Hitachi Ltd | Projection-system mask alignment unit |
| JPS5533197A (en) * | 1978-08-21 | 1980-03-08 | Zingher Arthur R | Both directional optical device changing optically projected parts member |
| JPS56110234A (en) * | 1980-02-06 | 1981-09-01 | Canon Inc | Projection printing device |
| JPS57142612A (en) * | 1981-02-27 | 1982-09-03 | Nippon Kogaku Kk <Nikon> | Alignment optical system of projection type exposure device |
| JPS5825638A (en) * | 1981-08-08 | 1983-02-15 | Canon Inc | Exposing device |
| JPS59141226A (en) * | 1983-02-02 | 1984-08-13 | Canon Inc | Optical device |
| JPS60261138A (en) * | 1984-06-08 | 1985-12-24 | Canon Inc | Positioning device |
-
1972
- 1972-07-05 JP JP47067399A patent/JPS4928362A/ja active Pending
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5493974A (en) * | 1978-01-06 | 1979-07-25 | Hitachi Ltd | Projection-system mask alignment unit |
| JPS6315739B2 (en) * | 1978-01-06 | 1988-04-06 | Hitachi Ltd | |
| JPS5533197A (en) * | 1978-08-21 | 1980-03-08 | Zingher Arthur R | Both directional optical device changing optically projected parts member |
| JPS56110234A (en) * | 1980-02-06 | 1981-09-01 | Canon Inc | Projection printing device |
| JPH0140490B2 (en) * | 1980-02-06 | 1989-08-29 | Canon Kk | |
| JPS57142612A (en) * | 1981-02-27 | 1982-09-03 | Nippon Kogaku Kk <Nikon> | Alignment optical system of projection type exposure device |
| JPS6352768B2 (en) * | 1981-02-27 | 1988-10-20 | Nippon Kogaku Kk | |
| JPS5825638A (en) * | 1981-08-08 | 1983-02-15 | Canon Inc | Exposing device |
| JPS59141226A (en) * | 1983-02-02 | 1984-08-13 | Canon Inc | Optical device |
| JPH0141252B2 (en) * | 1983-02-02 | 1989-09-04 | Canon Kk | |
| JPS60261138A (en) * | 1984-06-08 | 1985-12-24 | Canon Inc | Positioning device |
| JPH0145216B2 (en) * | 1984-06-08 | 1989-10-03 | Canon Kk |