JPS491058B1 - - Google Patents

Info

Publication number
JPS491058B1
JPS491058B1 JP44075249A JP7524969A JPS491058B1 JP S491058 B1 JPS491058 B1 JP S491058B1 JP 44075249 A JP44075249 A JP 44075249A JP 7524969 A JP7524969 A JP 7524969A JP S491058 B1 JPS491058 B1 JP S491058B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP44075249A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP44075249A priority Critical patent/JPS491058B1/ja
Priority to US74412A priority patent/US3624390A/en
Publication of JPS491058B1 publication Critical patent/JPS491058B1/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP44075249A 1969-09-24 1969-09-24 Pending JPS491058B1 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP44075249A JPS491058B1 (de) 1969-09-24 1969-09-24
US74412A US3624390A (en) 1969-09-24 1970-09-22 Specimen-heating means for electron beam irradiation apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP44075249A JPS491058B1 (de) 1969-09-24 1969-09-24

Publications (1)

Publication Number Publication Date
JPS491058B1 true JPS491058B1 (de) 1974-01-11

Family

ID=13570747

Family Applications (1)

Application Number Title Priority Date Filing Date
JP44075249A Pending JPS491058B1 (de) 1969-09-24 1969-09-24

Country Status (2)

Country Link
US (1) US3624390A (de)
JP (1) JPS491058B1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2116931A5 (fr) * 1970-12-11 1972-07-21 Onera (Off Nat Aerospatiale) Dispositif de protection d'appareillages d'etude d'echantillons a l'aide d'un pinceau d'electrons
US3919558A (en) * 1974-11-04 1975-11-11 Gen Electric Hot sub-stage for a scanning electron microscope
US4118630A (en) * 1977-05-05 1978-10-03 International Business Machines Corporation Ion implantation apparatus with a cooled structure controlling the surface potential of a target surface
FR2608837B1 (fr) * 1986-12-23 1994-06-10 Univ Metz Appareil de manipulation en translation d'un element, tel qu'un axe
US4833330A (en) * 1987-11-03 1989-05-23 Gatan Inc. Anticontaminator for transmission electron microscopes
DE68922061T2 (de) * 1988-10-03 1995-08-31 Canon Kk Vorrichtung zum Regeln der Temperatur.
NL8902727A (nl) * 1989-11-06 1991-06-03 Philips Nv Objecthouder voor ondersteuning van een object in een geladen deeltjesbundelsysteem.
US5296669A (en) * 1992-05-29 1994-03-22 Hitachi, Ltd. Specimen heating device for use with an electron microscope
US5563415A (en) * 1995-06-07 1996-10-08 Arch Development Corporation Magnetic lens apparatus for a low-voltage high-resolution electron microscope
US6025592A (en) * 1995-08-11 2000-02-15 Philips Electronics North America High temperature specimen stage and detector for an environmental scanning electron microscope
US6046457A (en) * 1998-01-09 2000-04-04 International Business Machines Corporation Charged particle beam apparatus having anticontamination means
DE19845804C2 (de) * 1998-09-30 2000-11-30 Tacr Turbine Airfoil Coating A Verfahren und Anordnung zum Erwärmen von Metallbauteilen mit Elektronenbestrahlung in einer Vakuumkammer
US20060196853A1 (en) * 2005-03-04 2006-09-07 The Regents Of The University Of California Micro-joining using electron beams
US9161392B2 (en) * 2009-04-07 2015-10-13 Yoshinobu ANBE Heating apparatus for X-ray inspection
WO2012166849A1 (en) * 2011-06-02 2012-12-06 Wisconsin Alumni Research Foundation Membrane detector for time-of-flight mass spectrometry

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3171958A (en) * 1962-03-30 1965-03-02 Rca Corp Heated specimen holder for the electron microscope
DE1157319B (de) * 1962-08-28 1963-11-14 Heraeus Gmbh W C Verfahren und Vorrichtung zum Erwaermen von Werkstoffen unter Vakuum auf hohe Temperaturen

Also Published As

Publication number Publication date
US3624390A (en) 1971-11-30

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