JPS4831969A - - Google Patents
Info
- Publication number
- JPS4831969A JPS4831969A JP6605071A JP6605071A JPS4831969A JP S4831969 A JPS4831969 A JP S4831969A JP 6605071 A JP6605071 A JP 6605071A JP 6605071 A JP6605071 A JP 6605071A JP S4831969 A JPS4831969 A JP S4831969A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6605071A JPS4831969A (en) | 1971-08-27 | 1971-08-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6605071A JPS4831969A (en) | 1971-08-27 | 1971-08-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4831969A true JPS4831969A (en) | 1973-04-26 |
Family
ID=13304642
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6605071A Pending JPS4831969A (en) | 1971-08-27 | 1971-08-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4831969A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63173322A (en) * | 1987-01-13 | 1988-07-16 | Toshiba Corp | Baking device for ic pattern |
| JPS6477124A (en) * | 1988-07-29 | 1989-03-23 | Hitachi Ltd | Projection type exposure device |
| US5153773A (en) * | 1989-06-08 | 1992-10-06 | Canon Kabushiki Kaisha | Illumination device including amplitude-division and beam movements |
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1971
- 1971-08-27 JP JP6605071A patent/JPS4831969A/ja active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63173322A (en) * | 1987-01-13 | 1988-07-16 | Toshiba Corp | Baking device for ic pattern |
| JPH0545051B2 (en) * | 1987-01-13 | 1993-07-08 | Tokyo Shibaura Electric Co | |
| JPS6477124A (en) * | 1988-07-29 | 1989-03-23 | Hitachi Ltd | Projection type exposure device |
| JPH0480530B2 (en) * | 1988-07-29 | 1992-12-18 | Hitachi Ltd | |
| US5153773A (en) * | 1989-06-08 | 1992-10-06 | Canon Kabushiki Kaisha | Illumination device including amplitude-division and beam movements |
| US5463497A (en) * | 1989-06-08 | 1995-10-31 | Canon Kabushiki Kaisha | Illumination device including an optical integrator defining a plurality of secondary light sources and related method |